research-article

An analytical model for conveyor based amhs in semiconductor wafer fabs

Authors:

Andrew Johnson,

Hector J. Carlo,

Jesus A. JimenezAuthors Info & Claims

WSC '08: Proceedings of the 40th Conference on Winter Simulation

Pages 2148 - 2155

Published: 07 December 2008 Publication History

Abstract

This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the work-in-process on the conveyor and assess the system stability. The analysis approach is based on a queuing model, but takes into account details of the operation of the AMHS including turntables. A numerical example is provided to demonstrate and validate the queuing model over a wide range of operating scenarios. The results indicated that the analytical model estimates the expected work-in-process on the conveyor with reasonable accuracy.

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Nazzal, D., and A. El-Nashar. 2007. Survey of research in modeling conveyor-based automated material handling systems in wafer fabs. In Proceedings of the 2007 Winter Simulation Conference.

Digital Library

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Cited By

Gaxiola GPabst DChristensen EWizelman DHill RKuhl M(2013)Methodology to evaluate the impact of amhs design characteristics on operational fab performanceProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675870(3806-3817)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675870
Gaxiola GChristensen EHammel CStachura PRose OUhrmacher A(2012)Methodology to best extend AMHS for site expansionProceedings of the Winter Simulation Conference10.5555/2429759.2429990(1-10)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429990
Pendharkar SBischak DRogers PRose OUhrmacher A(2012)Evaluating healthcare systems with insufficient capacity to meet demandProceedings of the Winter Simulation Conference10.5555/2429759.2429860(1-13)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429860
Show More Cited By

An analytical model for conveyor based amhs in semiconductor wafer fabs
1. Applied computing
2. General and reference
  1. Cross-computing tools and techniques

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Information & Contributors

Information

Published In

cover image ACM Conferences

WSC '08: Proceedings of the 40th Conference on Winter Simulation

December 2008

3189 pages

ISBN:9781424427086

Editors:
Scott Mason
University of Arkansas
,
Ray Hill
Air Force Institute of Technology
,
Lars Mönch
University of Hagen
,
Oliver Rose
University of Dresden
,
General Chair:
Thomas Jefferson
Intel Corporation
,
Program Chairs:
John W. Fowler
Arizona State University
,
Ricki G. Ingalls
Oklahoma State University

Sponsors

IIE: Institute of Industrial Engineers
INFORMS-SIM: Institute for Operations Research and the Management Sciences: Simulation Society
ASA: American Statistical Association
IEEE/SMC: Institute of Electrical and Electronics Engineers: Systems, Man, and Cybernetics Society
SIGSIM: ACM Special Interest Group on Simulation and Modeling
NIST: National Institute of Standards and Technology
(SCS): The Society for Modeling and Simulation International

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Winter Simulation Conference

Publication History

Published: 07 December 2008

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WSC08

Sponsor:

IIE
INFORMS-SIM
ASA
IEEE/SMC
SIGSIM
NIST
(SCS)

WSC08: Winter Simulation Conference

December 7 - 10, 2008

Florida, Miami

Acceptance Rates

WSC '08 Paper Acceptance Rate 249 of 304 submissions, 82%;

Overall Acceptance Rate 3,413 of 5,075 submissions, 67%

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Cited By

Gaxiola GPabst DChristensen EWizelman DHill RKuhl M(2013)Methodology to evaluate the impact of amhs design characteristics on operational fab performanceProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675870(3806-3817)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675870
Gaxiola GChristensen EHammel CStachura PRose OUhrmacher A(2012)Methodology to best extend AMHS for site expansionProceedings of the Winter Simulation Conference10.5555/2429759.2429990(1-10)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429990
Pendharkar SBischak DRogers PRose OUhrmacher A(2012)Evaluating healthcare systems with insufficient capacity to meet demandProceedings of the Winter Simulation Conference10.5555/2429759.2429860(1-13)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429860
Miller LBradley ATish AJin TJimenez JWright R(2011)Simulating conveyor-based AMHS layout configurations in small wafer lot manufacturing environmentsProceedings of the Winter Simulation Conference10.5555/2431518.2431748(1944-1952)Online publication date: 11-Dec-2011
https://dl.acm.org/doi/10.5555/2431518.2431748
Johnson ACarlo HJimenez JNazzal DLasrado VDunkin AIngalls R(2009)A greedy heuristic for locating crossovers in conveyor-based AMHS in wafer fabsWinter Simulation Conference10.5555/1995456.1995683(1667-1676)Online publication date: 13-Dec-2009
https://dl.acm.org/doi/10.5555/1995456.1995683

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