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A unified framework for simultaneous layout decomposition and mask optimization

Published: 13 November 2017 Publication History

Abstract

In advanced technology nodes, layout decomposition and mask optimization are two key stages in integrated circuit design. Due to the inconsistency of the objectives of these two stages, the performance of conventional layout and mask optimization may be suboptimal. To tackle this problem, in this paper we propose a unified framework, which seamlessly integrates layout decomposition and mask optimization. We propose a gradient based approach to solve the unified mathematical formulation, as well as a set of discrete optimization techniques to avoid being stuck in local optimum. The conventional optimization process can be accelerated as some inferior decompositions can be smartly pruned in early stages. The experimental results show that the proposed unified framework can achieve more than 17X speed-up compared with the conventional two-stage flow, meanwhile it can reduce EPE violations by 18%, and thus maintain better design quality.

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Cited By

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  • (2022)Efficient Design Rule Checking Script Generation via Key Information ExtractionProceedings of the 2022 ACM/IEEE Workshop on Machine Learning for CAD10.1145/3551901.3556494(77-82)Online publication date: 12-Sep-2022
  • (2020)Deep learning-driven simultaneous layout decomposition and mask optimizationProceedings of the 57th ACM/EDAC/IEEE Design Automation Conference10.5555/3437539.3437738(1-6)Online publication date: 20-Jul-2020
  • (2020)VLSI Mask Optimization: From Shallow To Deep LearningProceedings of the 25th Asia and South Pacific Design Automation Conference10.1109/ASP-DAC47756.2020.9045241(434-439)Online publication date: 17-Jan-2020
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  1. A unified framework for simultaneous layout decomposition and mask optimization

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    cover image ACM Conferences
    ICCAD '17: Proceedings of the 36th International Conference on Computer-Aided Design
    November 2017
    1077 pages

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    • IEEE-EDS: Electronic Devices Society

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    Published: 13 November 2017

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    View all
    • (2022)Efficient Design Rule Checking Script Generation via Key Information ExtractionProceedings of the 2022 ACM/IEEE Workshop on Machine Learning for CAD10.1145/3551901.3556494(77-82)Online publication date: 12-Sep-2022
    • (2020)Deep learning-driven simultaneous layout decomposition and mask optimizationProceedings of the 57th ACM/EDAC/IEEE Design Automation Conference10.5555/3437539.3437738(1-6)Online publication date: 20-Jul-2020
    • (2020)VLSI Mask Optimization: From Shallow To Deep LearningProceedings of the 25th Asia and South Pacific Design Automation Conference10.1109/ASP-DAC47756.2020.9045241(434-439)Online publication date: 17-Jan-2020
    • (2018)GAN-OPCProceedings of the 55th Annual Design Automation Conference10.1145/3195970.3196056(1-6)Online publication date: 24-Jun-2018

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