Location via proxy:   [ UP ]  
[Report a bug]   [Manage cookies]                

Development of a micromachined piezoelectric microphone for aeroacoustics applications

J Acoust Soc Am. 2007 Dec;122(6):3428-36. doi: 10.1121/1.2785040.

Abstract

This paper describes the design, fabrication, and characterization of a bulk-micromachined piezoelectric microphone for aeroacoustic applications. Microphone design was accomplished through a combination of piezoelectric composite plate theory and lumped element modeling. The device consists of a 1.80-mm-diam, 3-microm-thick, silicon diaphragm with a 267-nm-thick ring of piezoelectric material placed near the boundary of the diaphragm to maximize sensitivity. The microphone was fabricated by combining a sol-gel lead zirconate-titanate deposition process on a silicon-on-insulator wafer with deep-reactive ion etching for the diaphragm release. Experimental characterization indicates a sensitivity of 1.66 microVPa, dynamic range greater than six orders of magnitude (35.7-169 dB, re 20 microPa), a capacitance of 10.8 nF, and a resonant frequency of 59.0 kHz.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Acoustics / instrumentation*
  • Aircraft*
  • Atmospheric Pressure
  • Electric Capacitance
  • Electric Impedance
  • Equipment Design
  • Finite Element Analysis
  • Lead / chemistry*
  • Miniaturization*
  • Models, Chemical
  • Noise*
  • Reproducibility of Results
  • Silicon / chemistry*
  • Time Factors
  • Titanium / chemistry*
  • Vibration
  • Zirconium / chemistry*

Substances

  • lead titanate zirconate
  • Lead
  • Zirconium
  • Titanium
  • Silicon