Semiconductor Equipment
– PECVD, Plasma Etching & Surface Treatment –
for R&D and Production
News & Events
Samco Plasma Etching System RIE-10NR updates UIUC Material Research Lab
Samco reveals plans to install plasma etching system RIE-10NR early 2024 as the newest update to the Materials Research Lab (MRL) at the Uni...Visit the Samco Booth (#215) at CS MANTECH May 20-23, 2024 in Tucson, Arizona
The CS MANTECH 2024 International Conference on Compound Semiconductor Manufacturing Technology will be located at the JW Marriott Starr Pa...Scientific paper on Si subwavelength grating from Tohoku University, Japan
Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3–0.5 THz frequency band Kohei Chiba, Taiy...Scientific paper on polycrystalline Si film from Colorado School of Mines
Pinhole electrical conductivity in polycrystalline Si on locally etched SiNy/SiOx passivating contacts for Si solar cells C.L. Anderson a b,...Visit the Samco Booth (#223) at CS MANTECH May 15-18, 2023 in Orlando, Florida
The CS MANTECH 2023 International Conference on Compound Semiconductor Manufacturing Technology will be located at the Hyatt Regency Grand ...Join us for Photonic Integration Week at Valencia, Spain
Samco will have a booth at 6th Photonic Integration Week conference at at the Universitat Politècnica de València Campus from 20th to 22nd...Samco Unveils Plasma Enhanced ALD System for SiC and GaN Power Devices
Samco, a leading manufacturer of etching, deposition and surface treatment processing equipment for the semiconductor and related ind...Come Visit Samco Booth 1533 at SEMICON West 2022
Come visit Samco at Semicon West Booth 1533. We will introduce New plasma etch cluster tools and ALD equipment. If you are interested in dis...Explore Our Diverse Product Portfolio
Material Processing Data (Plasma Etch & PECVD)
About Samco
Samco Inc. stands as a leading semiconductor equipment company, delivering innovative process systems tailored for both Research and Development (R&D) and production environments. As industry pioneers, we bring forth cutting-edge solutions, leveraging advanced technologies including Atomic Layer Deposition (ALD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Reactive Ion Etch (RIE), Inductively Coupled Plasma (ICP) Etch, Deep Reactive Ion Etch (DRIE), Plasma Cleaning, Aqua Plasma and UV-Ozone Cleaning.
With over four decades of expertise, Samco is a beacon of knowledge, offering unrivaled experience in the development and deployment of highly reliable deposition, etching, cleaning, and surface treatment systems. Our commitment to excellence extends worldwide, serving customers in the electronics industry. At Samco, we take pride in collaborative partnerships, working closely with our clients to surpass even the most challenging process goals.
