"Lithography hotspot detection and mitigation in nanometer VLSI."

Jhih-Rong Gao et al. (2013)

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DOI: 10.1109/ASICON.2013.6811917

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-30

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Jhih-Rong Gao, Bei Yu, Duo Ding, David Z. Pan:
Lithography hotspot detection and mitigation in nanometer VLSI. ASICON 2013: 1-4

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