"A set of test structures for the development of a CMOS-MEMS technology."

Carlos Ramón Báez Álvarez et al. (2016)

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DOI: 10.1109/ICEEE.2016.7751206

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga, Javier de la Hidalga Wade:
A set of test structures for the development of a CMOS-MEMS technology. CCE 2016: 1-6

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