"Evolving MEMS Resonator Designs for Fabrication."

Gregory Hornby, William F. Kraus, Jason D. Lohn (2008)

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DOI: 10.1007/978-3-540-85857-7_19

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Gregory Hornby, William F. Kraus, Jason D. Lohn:
Evolving MEMS Resonator Designs for Fabrication. ICES 2008: 213-224

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