"Design of a Thermal-Bubble-Based Micromachined Accelerometer."

Ke-Min Liao, Rongshun Chen, Bruce C. S. Chou (2005)

> Home

Details and statistics

DOI: 10.1109/ICMENS.2005.133

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

- view
  authority control:
- export record
  dblp key:
  - conf/icmens/LiaoCC05
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icmens/LiaoCC05
Ke-Min Liao, Rongshun Chen, Bruce C. S. Chou:
Design of a Thermal-Bubble-Based Micromachined Accelerometer. ICMENS 2005: 438-442

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.