"Low-Frequency Noise Measurements to Characterize Cu-Electromigration Down ..."

Sofie Beyne et al. (2019)

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DOI: 10.1109/IRPS.2019.8720562

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Sofie Beyne, Olalla Varela Pedreira, Ingrid De Wolf, Zsolt Tökei, Kristof Croes:
Low-Frequency Noise Measurements to Characterize Cu-Electromigration Down to 44nm Metal Pitch. IRPS 2019: 1-6

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