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ORCIDMarc M. J. van de Wal
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2020 – today
- 2021
[j5]Daniel W. M. Veldman
, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer:
Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation. IEEE Trans. Control. Syst. Technol. 29(2): 514-529 (2021)- 2020
- [j4]Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Hendrik Nijmeijer:
Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion Equations. IEEE Control. Syst. Lett. 4(1): 193-198 (2020)
2010 – 2019
- 2019
- [c12]Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer:
Optimal actuator shape design with input and state constraints for a wafer heating application. ACC 2019: 3789-3794 - 2016
- [c11]M. Dorosti, F. J. M. Heck, Rob H. B. Fey, Marcel François Heertjes, Marc M. J. van de Wal, Henk Nijmeijer:
Frequency Response Sensitivity model updating using generic parameters. ACC 2016: 6215-6220 - 2014
- [j3]Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch:
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage. IEEE Trans. Control. Syst. Technol. 22(1): 102-118 (2014) - [c10]Robbert van Herpen, Tom Oomen, Edward Kikken, Marc M. J. van de Wal, Wouter H. T. M. Aangenent, Maarten Steinbuch:
Exploiting additional actuators and sensors for nano-positioning robust motion control. ACC 2014: 984-990 - 2013
- [c9]Frank Boeren, Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra:
Enhancing performance through multivariable weighting function design in ℋ- loop-shaping: with application to a motion system. ACC 2013: 6039-6044 - 2012
- [c8]Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch:
Next-generation wafer stage motion control: Connecting system identification and robust control. ACC 2012: 2455-2460 - 2010
- [c7]Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra:
Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage. ACC 2010: 3493-3499
2000 – 2009
- 2009
- [c6]Tom Oomen, Okko H. Bosgra, Marc M. J. van de Wal:
Identification for robust inferential control. CDC 2009: 2581-2586 - 2007
- [j2]Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra:
Design framework for high-performance optimal sampled-data control with application to a wafer stage. Int. J. Control 80(6): 919-934 (2007) - [c5]Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra:
Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a Solution. ACC 2007: 2881-2886 - 2006
- [c4]Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra:
Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control Design. ACC 2006: 1086-1091 - 2004
- [c3]M. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal:
Multi-objective H∞ control applied to a wafer stage model. CDC 2004: 796-802 - 2003
- [c2]Matthijs Boerlage, Maarten Steinbuch, Paul F. Lambrechts, Marc M. J. van de Wal:
Model-based feedforward for motion systems. CCA 2003: 1158-1163 - 2001
- [j1]Marc M. J. van de Wal, Bram de Jager:
A review of methods for input/output selection. Autom. 37(4): 487-510 (2001) - [c1]Marc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra:
Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage. CDC 2001: 1583-1588
Coauthor Index
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