default search action
"3D resist modeling for OPC correction and verification."
Liang Zhu et al. (2015)
- Liang Zhu, Qian Ren, Neo Tan, Zhibo Ai:
3D resist modeling for OPC correction and verification. ASICON 2015: 1-4
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.