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"Unified hysteresis and creep compensation in AFM tip positioning with an ..."

Zhiyu Wang et al. (2014)

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DOI: 10.1109/ICRA.2014.6907066

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Zhiyu Wang, Lianqing Liu, Zhidong Wang, Wenxue Wang:
Unified hysteresis and creep compensation in AFM tip positioning with an extended PI model. ICRA 2014: 1606-1611

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