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"Smoothing the way towards miniaturized MEMS AlN-based piezoelectric ..."
Guido Sordo et al. (2017)
- Guido Sordo, Jacopo Iannacci, Michael Schneider, Ulrich Schmid, Antonio Camarda, Marco Tartagni, Aldo Romani:
Smoothing the way towards miniaturized MEMS AlN-based piezoelectric transformers. IEEE SENSORS 2017: 1-3
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