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"1.5-nm Node Surrounding Gate Transistor (SGT)-SRAM Cell with Staggered ..."
Yisuo Li et al. (2021)
- Yisuo Li, Ken'ichi Kanazawa, Tetsuo Izawa, Koji Sakui, Georg Strof, Oskar Baumgartner, Gerhard Rzepa, Markus Karner, Zlatan Stanojevic, Nozomu Harada, Fujio Masuoka:
1.5-nm Node Surrounding Gate Transistor (SGT)-SRAM Cell with Staggered Pillar and Self-Aligned Process for Gate, Bottom Contact, and Pillar. IMW 2021: 1-4
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