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"A Flexible and Inherently Self-Consistent Methodology for MOL/BEOL/MIMCAP ..."

Ernest Y. Wu et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764541

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-28

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Ernest Y. Wu, Ron Bolam, Baozhen Li, Tian Shen, Barry P. Linder, Griselda Bonilla, Miaomiao Wang, Dechao Guo:
A Flexible and Inherently Self-Consistent Methodology for MOL/BEOL/MIMCAP TDDB Applications with Excessive Variability-Induced Degradation. IRPS 2022: 2

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