"Fabrication of ZnO thin film sensor for MIS flexible force feedback device."

Shih-Chi Chan et al. (2016)

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DOI: 10.1109/NEMS.2016.7758305

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-05

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Shih-Chi Chan, David T. W. Lin, Kai-Che Liu, Jing-Jim Ou, Ashwin Verma:
Fabrication of ZnO thin film sensor for MIS flexible force feedback device. NEMS 2016: 524-527

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