"Design and fabrication of an in-plane SOI MEMS accelerometer with a high ..."

Pengcheng Li et al. (2015)

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DOI: 10.1109/NEMS.2015.7147480

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Pengcheng Li, Xiaoying Li, Enfu Li, Qiang Shen, Honglong Chang:
Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate. NEMS 2015: 511-514

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