"First Observation of Ultra-high Polarization (~ 108 μC/cm²) in ..."

F. Huang et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185240

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-08

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F. Huang, B. Saini, L. Wan, H. Lu, X. He, S. Qin, Wilman Tsai, A. Gruverman, Andrew C. Meng, H.-S. Philip Wong, Paul C. McIntyre, Simon S. Wong:
First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes. VLSI Technology and Circuits 2023: 1-2

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