"Nonlinear Regression Fits for Simulated Cycle Time vs. Throughput Curves ..."

Rachel T. Johnson et al. (2004)

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DOI: —

access: open

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  dblp key:
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Rachel T. Johnson, Feng Yang, Bruce E. Ankenman, Barry L. Nelson:
Nonlinear Regression Fits for Simulated Cycle Time vs. Throughput Curves for Semicondutor Manufacturing. WSC 2004: 1951-1955

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