"Layout Decomposition for Quadruple Patterning Lithography and Beyond."

Bei Yu, David Z. Pan (2014)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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  - journals/corr/YuP14
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Bei Yu, David Z. Pan:
Layout Decomposition for Quadruple Patterning Lithography and Beyond. CoRR abs/1404.0321 (2014)

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