"Facing the challenge of designing for Cu/low-k reliability."

W. D. van Driel (2007)

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DOI: 10.1016/J.MICROREL.2007.04.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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W. D. van Driel:
Facing the challenge of designing for Cu/low-k reliability. Microelectron. Reliab. 47(12): 1969-1974 (2007)

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