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"Hydrogen passivation effects under negative bias temperature instability ..."

Hee-Dong Kim et al. (2010)

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DOI: 10.1016/J.MICROREL.2009.09.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hee-Dong Kim, Ho-Myoung An, Yujeong Seo, Yongjie Zhang, Jongsun Park, Tae Geun Kim:
Hydrogen passivation effects under negative bias temperature instability stress in metal/silicon-oxide/silicon-nitride/silicon-oxide/silicon capacitors for flash memories. Microelectron. Reliab. 50(1): 21-25 (2010)

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