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"Physical analysis, trimming and editing of nanoscale IC function with ..."
Rudolf Schlangen et al. (2009)
- Rudolf Schlangen, Reiner Leihkauf, Uwe Kerst, Ted R. Lundquist, Peter Egger, Christian Boit:
Physical analysis, trimming and editing of nanoscale IC function with backside FIB processing. Microelectron. Reliab. 49(9-11): 1158-1164 (2009)
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