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"Voltage acceleration and t63.2 of 1.6-10 nm gate oxides."

Rolf-Peter Vollertsen, Ernest Y. Wu (2004)

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DOI: 10.1016/J.MICROREL.2004.02.005

access: closed

type: Journal Article

metadata version: 2023-09-08

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Rolf-Peter Vollertsen, Ernest Y. Wu:
Voltage acceleration and t63.2 of 1.6-10 nm gate oxides. Microelectron. Reliab. 44(6): 909-916 (2004)

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