"Modeling of contact behavior between polishing pad and workpiece surface."

Fritz Klocke, Olaf Dambon, Richard Zunke (2008)

> Home

Details and statistics

DOI: 10.1007/S11740-007-0059-Z

access: closed

type: Journal Article

metadata version: 2020-08-06

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/peng/KlockeDZ08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/peng/KlockeDZ08
Fritz Klocke, Olaf Dambon, Richard Zunke:
Modeling of contact behavior between polishing pad and workpiece surface. Prod. Eng. 2(1): 9-14 (2008)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.