"Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer ..."

Yan Qiao et al. (2021)

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DOI: 10.1109/TSMC.2020.2964032

access: closed

type: Journal Article

metadata version: 2022-04-29

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Yan Qiao, Mengchu Zhou, Naiqi Wu, Zhiwu Li, Qinghua Zhu:
Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints. IEEE Trans. Syst. Man Cybern. Syst. 51(11): 6792-6807 (2021)

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