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2020 – today
- 2024
[j8]Kai Zhang
, Zhijian Hu, Fazhi Song, Xuefei Yang, Yang Liu:
Consensus of Input Constrained Multi-Agent Systems by Dynamic Time-Varying Event-Triggered Strategy With a Designable Minimal Inter-Event Time. IEEE Trans. Circuits Syst. II Express Briefs 71(4): 2119-2123 (2024)- [j7]Fazhi Song, Yang Liu, Yue Dong, Xinkai Chen, Jiubin Tan:
Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination. IEEE Trans. Instrum. Meas. 73: 1-40 (2024) - 2022
- [j6]Fazhi Song, Yang Liu, Dong Shen, Li Li, Jiubin Tan:
Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation. IEEE Trans. Ind. Electron. 69(12): 13428-13438 (2022) - [j5]Fazhi Song, Yang Liu, Wen Jin, Jiubin Tan, Wei He:
Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach. IEEE Trans. Neural Networks Learn. Syst. 33(4): 1594-1608 (2022) - 2020
- [j4]Fazhi Song, Yang Liu, Xianli Wang, Wen Jin, Li Li:
Enhancing Accuracy and Numerical Stability for Repetitive Time-Varying System Identification: An Iterative Learning Approach. IEEE Access 8: 25679-25690 (2020)
2010 – 2019
- 2019
- [j3]Fazhi Song, Yang Liu, Jianxin Xu, Xiaofeng Yang, Qiao Zhu:
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. IEEE Trans. Ind. Electron. 66(4): 3106-3116 (2019) - 2018
- [j2]Fazhi Song, Yang Liu, Jun Cao, Li Li, Jiubin Tan:
Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Complex. 2018: 5406035:1-5406035:11 (2018) - [j1]Fazhi Song, Yang Liu, Jian-Xin Xu, Xiaofeng Yang, Ping He, Zhile Yang:
Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay. IEEE Trans. Ind. Electron. 65(9): 7579-7589 (2018) - 2017
- [c1]Fazhi Song, Yang Liu, Zhile Yang, Xiaofeng Yang, Ping He:
Iterative Learning Identification with Bias Compensation for Stochastic Linear Time-Varying Systems. LSMS/ICSEE (2) 2017: 231-239
Coauthor Index
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