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"Design of a Vacuum-Assisted Soft UV-Imprint System for Micro-Nano ..."

Yaoxin Chen et al. (2018)

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DOI: 10.1109/ICINFA.2018.8812366

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
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Yaoxin Chen, Cui Ma, Ming Yu, Jiamin Yu, Hui Lin:
Design of a Vacuum-Assisted Soft UV-Imprint System for Micro-Nano Structures Patterning on Nonplanar Surfaces. ICIA 2018: 1037-1041

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