"A novel method for fabricating MEMS three-axis accelerometers using low ..."

Serdar Tez, Mustafa Mert Torunbalci, Tayfun Akin (2016)

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DOI: 10.1109/ICSENS.2016.7808705

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Serdar Tez, Mustafa Mert Torunbalci, Tayfun Akin:
A novel method for fabricating MEMS three-axis accelerometers using low temperature Au-Sn eutectic bonding. IEEE SENSORS 2016: 1-3

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