"Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays."

Qi Chen et al. (2018)

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DOI: 10.1109/NEMS.2018.8557025

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-09

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Qi Chen, Yifan Wang, Hua Zhang, Zewen Liu:
Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays. NEMS 2018: 511-514

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