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"A real-time temperature compensation algorithm for a force-rebalanced MEMS ..."

Jiehui Du et al. (2017)

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DOI: 10.1109/NEMS.2017.8017009

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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  dblp key:
  - conf/nems/DuGLZJ17
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  - https://dblp.org/rec/conf/nems/DuGLZJ17
Jiehui Du, Yixuan Guo, Yiyu Lin, Xudong Zheng, Zhonghe Jin:
A real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer based on resonant frequency. NEMS 2017: 214-217

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