"Design and fabrication of a novel silicon probe for micromachined surface ..."

Senlin Jiang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592110

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Senlin Jiang, Dacheng Zhang, Zhenchuan Yang, Guizhen Yan:
Design and fabrication of a novel silicon probe for micromachined surface profilers. NEMS 2010: 941-944

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