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"Atomic visualization of the emergence of orthorhombic phase in ..."

Tianjiao Xin et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830185

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
  - conf/vlsit/XinZCDWGSZZLHDS22
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  - https://dblp.org/rec/conf/vlsit/XinZCDWGSZZLHDS22
Tianjiao Xin, Yonghui Zheng, Yan Cheng, Kai Du, Yiwei Wang, Zhaomeng Gao, Diqing Su, Yunzhe Zheng, Qilan Zhong, Cheng Liu, Rong Huang, Chungang Duan, Sannian Song, Zhitang Song, Hangbing Lyu:
Atomic visualization of the emergence of orthorhombic phase in Hf0.5Zr0.5O2 ferroelectric film with in-situ rapid thermal annealing. VLSI Technology and Circuits 2022: 343-344

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