research-article

Accurate detection for process-hotspots with vias and incomplete specification

Authors:

Jingyu Xu,

Subarna Sinha,

Charles C. ChiangAuthors Info & Claims

ICCAD '07: Proceedings of the 2007 IEEE/ACM international conference on Computer-aided design

Pages 839 - 846

Published: 05 November 2007 Publication History

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Abstract

This paper introduces the concept of via range patterns and incompletely specified range patterns to represent new types of process-hotspots. Via range patterns can represent process-hotspots containing vias that are a major source of lithography issues. An incompletely specified range pattern can accurately and succinctly represent a process-hotspot where any configuration of objects (that is unknown to the user apriori) can exist in some of its peripheral regions. These new types of range patterns cannot be accurately represented and/or detected using the concept of range patterns introduced in [7].

A new detection algorithm that can accurately detect these new types of patterns is also proposed. This is necessitated since the range pattern matching algorithm proposed earlier causes mismatches: it either misses true matches or reports false matches for these new kinds of patterns. Theoretical results show that the proposed algorithm prevents the incorrect mis-match issues, while experimental results on fab provided process-hotspots show the algorithm is computationally efficient and practical for use on real industrial designs.

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Cited By

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Ye WLin YLi MLiu QPan DShibuya T(2019)LithoROCProceedings of the 24th Asia and South Pacific Design Automation Conference10.1145/3287624.3288746(292-298)Online publication date: 21-Jan-2019
https://dl.acm.org/doi/10.1145/3287624.3288746
Chen KChuang YYu BFang S(2017)Minimizing Cluster Number with Clip Shifting in Hotspot Pattern ClassificationProceedings of the 54th Annual Design Automation Conference 201710.1145/3061639.3062283(1-6)Online publication date: 18-Jun-2017
https://dl.acm.org/doi/10.1145/3061639.3062283
Chang WJiang IYu YLiu W(2017)iClaireProceedings of the 54th Annual Design Automation Conference 201710.1145/3061639.3062263(1-6)Online publication date: 18-Jun-2017
https://dl.acm.org/doi/10.1145/3061639.3062263
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Published In

ICCAD '07: Proceedings of the 2007 IEEE/ACM international conference on Computer-aided design

November 2007

933 pages

ISBN:1424413826

General Chair:
Georges Gielen
ESAT-MICAS, Katholieke Univ. Leuven, Leuven, Belgium

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IEEE Press

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Published: 05 November 2007

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ICCAD07

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CEDA
SIGDA
IEEE-CS\DATC

ICCAD07: The International Conference on Computer-Aided Design 2007

November 5 - 8, 2007

California, San Jose

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ICCAD '07 Paper Acceptance Rate 139 of 510 submissions, 27%;

Overall Acceptance Rate 457 of 1,762 submissions, 26%

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Ye WLin YLi MLiu QPan DShibuya T(2019)LithoROCProceedings of the 24th Asia and South Pacific Design Automation Conference10.1145/3287624.3288746(292-298)Online publication date: 21-Jan-2019
https://dl.acm.org/doi/10.1145/3287624.3288746
Chen KChuang YYu BFang S(2017)Minimizing Cluster Number with Clip Shifting in Hotspot Pattern ClassificationProceedings of the 54th Annual Design Automation Conference 201710.1145/3061639.3062283(1-6)Online publication date: 18-Jun-2017
https://dl.acm.org/doi/10.1145/3061639.3062283
Chang WJiang IYu YLiu W(2017)iClaireProceedings of the 54th Annual Design Automation Conference 201710.1145/3061639.3062263(1-6)Online publication date: 18-Jun-2017
https://dl.acm.org/doi/10.1145/3061639.3062263
Zhang HZhu FLi HYoung EYu BOzdal MChu C(2017)Bilinear Lithography Hotspot DetectionProceedings of the 2017 ACM on International Symposium on Physical Design10.1145/3036669.3036673(7-14)Online publication date: 19-Mar-2017
https://dl.acm.org/doi/10.1145/3036669.3036673
Yu YJiang IZhang YChiang CChang Y(2014)DRC-based hotspot detection considering edge tolerance and incomplete specificationProceedings of the 2014 IEEE/ACM International Conference on Computer-Aided Design10.5555/2691365.2691390(101-107)Online publication date: 3-Nov-2014
https://dl.acm.org/doi/10.5555/2691365.2691390
Andrades CRodríguez MChiang CFettweis GNebel W(2014)Signature indexing of design layouts for hotspot detectionProceedings of the conference on Design, Automation & Test in Europe10.5555/2616606.2617111(1-6)Online publication date: 24-Mar-2014
https://dl.acm.org/doi/10.5555/2616606.2617111
Lin SChen JLi JWen WChang S(2013)A novel fuzzy matching model for lithography hotspot detectionProceedings of the 50th Annual Design Automation Conference10.1145/2463209.2488817(1-6)Online publication date: 29-May-2013
https://dl.acm.org/doi/10.1145/2463209.2488817
Yu YLin GJiang IChiang C(2013)Machine-learning-based hotspot detection using topological classification and critical feature extractionProceedings of the 50th Annual Design Automation Conference10.1145/2463209.2488816(1-6)Online publication date: 29-May-2013
https://dl.acm.org/doi/10.1145/2463209.2488816
Yu YChan YSinha SJiang IChiang CGroeneveld PSciuto DHassoun S(2012)Accurate process-hotspot detection using critical design rule extractionProceedings of the 49th Annual Design Automation Conference10.1145/2228360.2228576(1167-1172)Online publication date: 3-Jun-2012
https://dl.acm.org/doi/10.1145/2228360.2228576
Ding DTorres APikus FPan D(2011)High performance lithographic hotspot detection using hierarchically refined machine learningProceedings of the 16th Asia and South Pacific Design Automation Conference10.5555/1950815.1950963(775-780)Online publication date: 25-Jan-2011
https://dl.acm.org/doi/10.5555/1950815.1950963
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Accurate process-hotspot detection using critical design rule extraction

DRC-based hotspot detection considering edge tolerance and incomplete specification

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