Location via proxy:   [ UP ]  
[Report a bug]   [Manage cookies]                
Skip to main content
Springer Nature Link
Log in

Polymer microfabrication technologies for microfluidic systems

  • Review
  • Published:
Analytical and Bioanalytical Chemistry Aims and scope Submit manuscript

Abstract

Polymers have assumed the leading role as substrate materials for microfluidic devices in recent years. They offer a broad range of material parameters as well as material and surface chemical properties which enable microscopic design features that cannot be realised by any other class of materials. A similar range of fabrication technologies exist to generate microfluidic devices from these materials. This review will introduce the currently relevant microfabrication technologies such as replication methods like hot embossing, injection molding, microthermoforming and casting as well as photodefining methods like lithography and laser ablation for microfluidic systems and discuss academic and industrial considerations for their use. A section on back-end processing completes the overview.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
$34.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or eBook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17
Fig. 18
Fig. 19
Fig. 20

Similar content being viewed by others

Explore related subjects

Discover the latest articles, news and stories from top researchers in related subjects.

Abbreviations

CE:

Capillary electrophoresis

COC/COP:

Cycloolefin/copolymer

DT:

Decomposition temperature

HDT:

Heat distortion temperature

LIGA:

Lithographie (lithography), galvanoformung (electroplating), abformung (molding)

MEMS:

Micro electromechanical systems

μ-TAS:

Miniaturized total analysis system

μ-EDM:

Micro-electrode discharge machining

MST:

Microsystem technology

TAS:

Total analysis system

T g :

Glass transition temperature

PC:

Polycarbonate

PDMS:

Poly(dimethylsiloxane)

PE:

Polyethylene

PEEK:

Polyetheretherketone

PFPE:

Perfluoropolyether

PI:

Polyimide

PMMA:

Poly(methyl methacrylate)

POC:

Point-of-care

PP:

Polypropylene

PS:

Polystyrene

TPE:

Thermoset polyester

References

  1. Manz A, Becker H (eds) (1998) Microsystem technology in the life sciences. Springer, Berlin

  2. Gardeniers JGE, Oosterbroek RE, van den Berg A (2003) In: Oosterbroeck RE, van den Berg A (eds) Lab-on-a-Chip. Elsevier, London, pp 37–64

  3. http://www.ncbi.nlm.nih.gov/sites/entrez. Cited 21 June 2007

  4. Haber C (2006) Lab Chip 6:1118–1121

    CAS  Google Scholar 

  5. Madou M (2002) Fundamentals of microfabrcation. CRC, New York

  6. Ahn CH, Choi JW, Beaucage G, Nevin JH, Lee JB, Puntambekar A, Lee JY (2004) Proc IEEE 92:154–173

    CAS  Google Scholar 

  7. Mela P, van den Berg A, Fintschenko Y, Cummings EB, Simmons BA, Kirby BJ (2005) Electrophoresis 26:1792–1799

    CAS  Google Scholar 

  8. Yang Y, Li C, kameoka J, Lee KH, Craighead HG (2005) Lab Chip 5:869–876

    CAS  Google Scholar 

  9. Rolland JP, Van Dam RM, Schorzman DA, Quake SR, DeSimone JM (2004) J Am Chem Soc 126(8):2322–2323

    CAS  Google Scholar 

  10. Strong AB (2006) Plastics, Pearson Prentice Hall

  11. http://www.kern-gmbh.de/cgi-bin/riweta.cgi?nr=2610&lng=1. Cited 8 June 2007

  12. http://plastics.bayer.com/plastics/emea/en/literature/pdf/36207.pdf?docId=36207. Cited 8 June 2007

  13. http://www.kern-gmbh.de/cgi-bin/riweta.cgi?nr=1502&lng=1; http://www.goodfellow.com/csp/active/STATIC/E/Polypropylene.HTML. Cited 8 June 2007

  14. http://www.matweb.com/search/SpecificMaterial.asp?bassnum=PDW169. Cited 8 June 2007

  15. http://www.goodfellow.com/csp/active/static/G/Polyethylen_-_niedrige_Dichte.HTML. Cited 8 June 2007

  16. http://www.topas.com/tds_8007x10_e-3.pdf. Cited 8 June 2007

  17. http://www.zeonchemicals.com/zeonex.aspx. Cited 8 June 2007

  18. http://www.victrex.com/de/peek_poly/properties.php. Cited 8 June 2007

  19. http://www.dowcorning.com/applications/search/default.aspx?R=3146DE&DCCSF=218DE&DCCSF=24DE. Cited 8 June 2007

  20. http://www2.dupont.com/Kapton/en_US/assets/downloads/pdf/Gen_Specs.pdf. Cited 8 June 2007

  21. http://www.microchem.com/products/pdf/SU-8-table-of-properties.pdf. Cited 8 June 2007

  22. Hawkins KR, Yager P (2003) Lab Chip 3:248–252

    CAS  Google Scholar 

  23. Piruska A, Nikcevic I, Lee SH, Ahn C, Heineman WR, Limbach PA, Seliskar CJ (2005) Lab Chip 5:1348–1354

    CAS  Google Scholar 

  24. Shadpour H, Musyimi H, Chen J, Soper S (2006) J Chromatogr A 1111:238–251

    CAS  Google Scholar 

  25. Kirby BJ, Hasselbrink EF Jr (2004) Electrophoresis 25:203–213

    CAS  Google Scholar 

  26. Burns MA et al (1998) Science 282(5388):484–487

    CAS  Google Scholar 

  27. Harrison C, Cabral J, Stafford C, Karim A, Amis E (2004) J Miromech Microeng 14:153–158

    Google Scholar 

  28. Harealdsson T, Hutchison B, Sebra R, Good B, Anseth K, Bowman C (2006) Sens Actuators B 133:454–460

    Google Scholar 

  29. Lin CH et al (2002) J Micromech Microeng 12:590–597

    CAS  Google Scholar 

  30. Sikanen T, Tuomikoski S, Ketola R, Kostiainen R, Franssila S, Kotiaho T (2005) Lab Chip 5:888–896

    CAS  Google Scholar 

  31. Tuomikoski S, Sikanen T, Ketola R, Kostiainen R, Kotiaho T, Franssila S (2005) Electrophoresis 26:4691–4702

    CAS  Google Scholar 

  32. Gadre et al (2004) Sens Actuators A 114:478–485

    Google Scholar 

  33. Nijdam A et al (2005) Sens Actuators A 120:172–183

    Google Scholar 

  34. Liu G, Tian Y, Zhang X (2003) Microsyst Technol 9:461–464

    CAS  Google Scholar 

  35. Ribeiro J, Minas G, Wolfenbuttel R, Correia J (2005) Sens Actuators A 123–124:77–81

    Google Scholar 

  36. Lo YC, Huang CS, Hsu W, Wang C (2004) Proc MEMS, NANO and Smart Systems, ICMENS, pp 671–674

  37. Guerin L, Bossel M, Demierre M, Calmes S, Renaud P (1997) Proc Transducers 97:1419–1422

    Google Scholar 

  38. Tay F, van Kan J, Watt F, Choong W (2001) J Micromech Microeng 11:27–32

    CAS  Google Scholar 

  39. Lin CH, Lee GB, Chang BW, Chang GL (2002) J Micromech Microeng 12:590–597

    CAS  Google Scholar 

  40. Yu H, Balogun O, Li B, Murray T, Zhang X (2006) Sens Actuators A 27:228–234

    Google Scholar 

  41. Metz S, Jiguet S, Bertsch A, Renaud P (2004) Lab Chip 4:114–117

    CAS  Google Scholar 

  42. Sato H, Matsumura H, Keino S, Shoji S (2006) J Micromech Microeng 16:2318–2322

    Google Scholar 

  43. Lee JR, Barber JP, George ZA, Lee ML, Schmidt H, Hawkins AR J. Micro/Nanolith. MEMS MOEMS 6:013010–0130017

  44. Agirregabiria M et al (2005) Lab Chip 5:545–552

    CAS  Google Scholar 

  45. Abgrall P, Lattes C, Conedera V, Dollat X, Colin S, Gue A (2006) J Micromech Microeng 16:113–121

    Google Scholar 

  46. Dykes JM et al (2007) Proc SPIE 6465, 64650N-1-64650N-12

  47. Yu H, Balogun O, Li B, Murray T, Zhang X (2006) Sens Actuators A 127:228–234

    Google Scholar 

  48. Chuan YJ, Tseng FG, Cheng JH, Lin WK (2005) Sen Actuators A 103:64–69

    Google Scholar 

  49. Alderman BEJ, Mann CM, Steenson DP, Chamberlain JM (2001) J Micromech Microeng 11:703–705

    CAS  Google Scholar 

  50. http://www.geocities.com/guerinlj/. Cited 29 June 2007

  51. Low LM, Seetharaman S, He KQ, Madou MJ (2000) Sens Actuators B 67(1–2):149–160

    Google Scholar 

  52. Burdick JA, Khademhosseini A, Langer R (2004) Langmuir 20:5153–5156

    CAS  Google Scholar 

  53. Ibrahim MWA, Saunders JR, Walied MA (2005) Proc MEMS, NANO and Smart Systems, pp 221–222

  54. Kim D, Beebe DJ (2007) Lab Chip 7:193–198

    CAS  Google Scholar 

  55. Beebe DJ et al (2000) Proc Natl Acad Sci 97:13488–13493

    CAS  Google Scholar 

  56. Golden AP, Tien J (2007) Lab Chip 7:720–725

    CAS  Google Scholar 

  57. Vulto P et al (2005) Lab Chip 5:158–162

    CAS  Google Scholar 

  58. Tsai DM, Lin KW, Zen JM, Chen HY, Hong RH (2005) Electrophoresis 26:3007–3012

    CAS  Google Scholar 

  59. Tsai YC, Jen HP, Lin KW, Hsieh YZ (2006) J Chromatogr A 1111:267–271

    CAS  Google Scholar 

  60. Jackman R, Floyd T, Ghodssi R, Schmidt M, Jensen K (2001) J Micromech Microeng 11:263–269

    CAS  Google Scholar 

  61. Takeuchi S, Ziegler D, Yoshida Y, Mabuchi K, Suzuki T (2005) Lab Chip 5:519–523

    CAS  Google Scholar 

  62. Lucio do Lago C, Torres da Silva HD, Neves CA, Alves Brito-Neto JG, Fracassi da Silva JA (2003) Anal Chem 75(15):3853–3858

    Google Scholar 

  63. Coltro WK, da Silva JA, da Silva HD, Richter EM, Furlan R, Angnes L, do Lago CL, Mazo LH, Carrilho E (2004) Electrophoresis 25:3832–3839

    CAS  Google Scholar 

  64. He FY, Liu AL, Yuan JH, Coltro WK, Carrilho E, Xia XH (2005) Anal Bioanal Chem 382:192–197

    CAS  Google Scholar 

  65. Liu AL et al (2005) Lab Chip 5:974–978

    CAS  Google Scholar 

  66. Liu AL, He FY, Hu YL, Xia XH (2006) Talanta 68:1303–1308

    CAS  Google Scholar 

  67. Hutchison JB, Haraldsson KT, Good BT, Sebra RP, Luo N, Anseth KS, Bowman CN (2004) Lab Chip 4:658–662

    CAS  Google Scholar 

  68. Bertsch A, Lorenz H, Renaud P (1999) Sens Actuators A 73:14–23

    Google Scholar 

  69. Maruo S, Ikuta K (2002) Sens Actuators A 100:70–76

    Google Scholar 

  70. Maruo S, Ikuta K, Korogi h (2003) Appl Phys Lett 82:133–135

    CAS  Google Scholar 

  71. Teh W, Dürig U, Dreschler U, Smith C, Güntherodt H-J (2005) J Appl Phys 97:054907–054917

    Google Scholar 

  72. Sodian R, Loebe M, Hein A, Martin DP, Hoerstrup SP, Potapov EV, Hausmann H, Lueth T, Hetzer R (2002) ASAIO J 48:12–16

    Google Scholar 

  73. Sun HB, Kawata S (2004) Adv Polym Sci 170:169–173

    CAS  Google Scholar 

  74. Han A, Graff M, Wang O, Frazier AB (2005) IEEE Sensors J 5(1):82–89

    Google Scholar 

  75. Länge K, Blaess G, Voigt A, Götzen R, Rapp M (2006) Biosens Bioelectron 22:227–232

    Google Scholar 

  76. Harrison C, Cabral JT, Stafford CM, Karim A, Amis EJ (2004) J Micromech Microeng 14:153–158

    Google Scholar 

  77. Cabral JT, Stafford CM, Harrison C, Douglas JF (2004) Langmuir 20:10020–10029

    CAS  Google Scholar 

  78. Khan Malek CG (2006) Anal Bioanal Chem 385:1351–1361

    CAS  Google Scholar 

  79. Khan Malek CG (2006) Anal Bioanal Chem 385:1362–1369

    CAS  Google Scholar 

  80. Kim J, Xu X (2003) J Laser Appl 15:255–260

    CAS  Google Scholar 

  81. Yin H, Killeen K, Brennen R, Sobek D, Werlich M, van de Goor T (2005) Anal Chem 77:527–533

    CAS  Google Scholar 

  82. Killeen K, Yin H, Sobek D, Brennen R, van de Goor T (2003) Proc MicroTAS 2003:481–484

    Google Scholar 

  83. Metz S, Holzer R, Renaud Ph (2001) Lab Chip 1:29–34

    CAS  Google Scholar 

  84. Metz S, Bertsch A, Bertand D, Renaud Ph (2004) Biosens Bioelectronics 19:1309–1318

    CAS  Google Scholar 

  85. Johnson TJ, Ross D, Gaitan M, Locascio LE (2001) Anal Chem 73:3656–3661

    CAS  Google Scholar 

  86. Bianchi F, Chevelot Y, Mathieu HJ, Girault HH (2001) Anal Chem 73:3845–3853

    CAS  Google Scholar 

  87. Pham D, Tonge L, Cao J, Wright J, Papiernik M, Harvey E, Niclau D (2002) Smart Mat Struct 11:668–674

    CAS  Google Scholar 

  88. Waddell EA, Locascio LE, Kramer GW (2002) J Assoc Lab Automat 7(1):78–82

    CAS  Google Scholar 

  89. Klank H, Kutter JP, Geschke O (2002) Lab Chip 2(4):242–247

    CAS  Google Scholar 

  90. Snakenborg D, Klank H, Kutter JP (2004) J Micromech Microeng 14:182–189

    CAS  Google Scholar 

  91. Ke K, Hasselbrink EF, Hunt AJ (2005) Anal Chem 77:5083–5088

    CAS  Google Scholar 

  92. Yamasaki K, Juodkazis S, Matsuo S, Misawa H (2003) Appl Phys A 77:371–373

    CAS  Google Scholar 

  93. Gomez D, Goenaga I, Lizuain I, Ozaita M (2005) Optical Eng 44:051105-1–051105-8

    Google Scholar 

  94. Heckele M, Schomburg WK (2004) J Micromech Microeng 14:1–14

    Google Scholar 

  95. Becker H, Heim U (1999) Sens Mater 11(5):297–304

    CAS  Google Scholar 

  96. Esch MB, Kapur S, Irizarry G, Genova V (2003) Lab Chip 3:121–127

    CAS  Google Scholar 

  97. Khan Malek C, Coudevylle JR, Jeannot JC, Duffait R (2007) Microsyst Technol 13(5–6):475–481

    CAS  Google Scholar 

  98. Kukharenka M, Farooqui M, Grigore L, Kraft M, Hollinshead N (2003) J Micromech Microeng 13:67–74

    Google Scholar 

  99. Hupert ML, Guy WJ, Llopis SD, Shadpour H, Rani S, Nikitopoulos DE, Soper SA (2007) Microfluid Nanofluid 3:1–11

    CAS  Google Scholar 

  100. Steigert J et al (2007) J Micromech Microeng 17:333–341

    CAS  Google Scholar 

  101. Narasimhan J, Papautsky I (2004) J Micromech Microeng 14:96–103

    Google Scholar 

  102. Zhou K, Papautsky I (2007) Proc SPIE 6465:64650R–1–64650R–11

    Google Scholar 

  103. Azcarate S, Uriarte L, Schoth A, Bigot S, Tosello G, Roth S, Staemmler L (2006) Proc 2nd Int Conf Multi-4M, pp 305–308

  104. Jensen MF, McCormack JE, Helbo B, Christensen LH, Christensen TR, Geschke O (2004) Lab Chip 4:391–395

    CAS  Google Scholar 

  105. Pfleging W, Bernauer W, Hanemann T, Torge M (2002) Microsys Technol 9:67–74

    CAS  Google Scholar 

  106. Heckele M, Bacher W, Mueller KD (1998) Microsyst Technol 4:122–124

    Google Scholar 

  107. Becker H, Heim U (2000) Sens Actuators 83:130–135

    Google Scholar 

  108. Juang YJ, Lee LJ, Koelling KW (2002) Polym Eng Sci 42:539–550

    CAS  Google Scholar 

  109. Juang YJ, Lee LJ, Koelling KW (2002) Polym Eng Sci 42:551–566

    CAS  Google Scholar 

  110. Scheer HC, Schulz H (2001) Microelectron Eng 56:311–332

    CAS  Google Scholar 

  111. Schulz H, Wissen M, Scheer HC (2003) Microelectron Eng 67–68:657–663

    Google Scholar 

  112. Rowland HD, King WP (2004) J Micromech Microeng 14:1625–1632

    CAS  Google Scholar 

  113. Young WB (2005) Microelectron Eng 77:405–411

    CAS  Google Scholar 

  114. Armani D, Liu C (2000) J Micromech Microeng 10:80–84

    CAS  Google Scholar 

  115. Barker SLR, Ross D, Tarlov MJ, Gaitan M, Locascio LE (2000) Anal Chem 72:5925–5929

    CAS  Google Scholar 

  116. Barker SLR, Tarlov MJ, Canavan H, Hickman JJ, Locascio LE (2000) Anal Chem 72:4899–4903

    CAS  Google Scholar 

  117. Kameoka J, Craighaed HG, Zhang H, Henion J (2001) Anal Chem 73:1935–1941

    CAS  Google Scholar 

  118. Meng Z, Qi S, Soper SA, Limbach PA (2001) Anal Chem 73:1286–1291

    CAS  Google Scholar 

  119. Liu Y, Ganser D, Schneider A, Liu R, Grodzinski P, Kroutchinina N (2001) Anal Chem 73:4196–4201

    CAS  Google Scholar 

  120. Kameoka J, Orth R, Czaplewski D, Wachs T, Craighead H (2002) Anal Chem 74:5897–5901

    CAS  Google Scholar 

  121. Kricka LJ, Fortina P, Panaro NJ, Wilding P, Alonso-Amigo G, Becker H (2002) Lab Chip 2:1–4

    CAS  Google Scholar 

  122. Galloway M et al (2002) Anal Chem 74:2407–2415

    CAS  Google Scholar 

  123. Qi SZ et al (2002) Lab Chip 2:88–95

    CAS  Google Scholar 

  124. Liu J, Pan T, Woolley AT, Lee ML (2004) Anal Chem 76:6948–6955

    CAS  Google Scholar 

  125. Liu J, Sun X, Lee ML (2005) Anal Chem 77:6280–6287

    CAS  Google Scholar 

  126. Mills C, Martinez E, Bessueille F, Villaneuva G, Bausells J, Samiter J, Errachid A (2005) Microelectron Eng 78–79:695–700

    Google Scholar 

  127. Castaño-Álvarez M, Fernández-Abedul MT, Costa-García A (2005) Electrophoresis 26:3160–3168

    Google Scholar 

  128. Yang Y, Li C, Lee KH, Craighead HG (2005) Electrophoresis 26:3622–3630

    CAS  Google Scholar 

  129. Cameron NS, Roberge H, Veres T, Jakeway SC, Crabtree HJ (2006) Lab Chip 6:936–941

    CAS  Google Scholar 

  130. Bhattacharyya A, Klapperich C (2006) Anal Chem 78:788–792

    CAS  Google Scholar 

  131. Bhattacharyya A, Klapperich C (2007) Biomedical Microdevices 9(2):245–251

    CAS  Google Scholar 

  132. Yao D, Nagarajan P, Li L, Yi AY (2007) Polymer Eng Sci 47:530–539

    CAS  Google Scholar 

  133. Roos N, Luxbacher T, Glinsner T, Pfeiffer K, Schul H, Scheer HC (2001) Proc SPIE 4343:427–435

    CAS  Google Scholar 

  134. Worgull M, Heckele M, Schomburg WK (2005) Microsyst Technol 12:110–115

    CAS  Google Scholar 

  135. Kimerling TE, Liu W, Kim BH, Yao D (2006) Microsyst Technol 12(8):730–735

    CAS  Google Scholar 

  136. Cao H, Yu Z, Wang J, Tegenfeldt J, Austin R, Chen E, Wu W, Chou S (2002) Appl Phys Lett 81:174–176

    CAS  Google Scholar 

  137. Pépin A, Youinou P, Studer V, Lebib A, Chen Y (2002) Microelec Engin 61–62:927–932

    Google Scholar 

  138. Nilsson D, Balslev S, Kristensen A (2005) J Micromech Microeng 15:296–300

    CAS  Google Scholar 

  139. Bilenberg B et al (2005) J Vac Sci Technol B 23(6):2944–2949

    CAS  Google Scholar 

  140. Mills CA, Martínez E, Errachid A, Gomila G, Samsó A, Samitier J (2005) Contrib Sci 3:47–56

    Google Scholar 

  141. Giselbrecht S et al (2004) Proc Nanobiotechnology 151:151–157

    CAS  Google Scholar 

  142. Giselbrecht S et al (2006) Biomedical Microdevices 8:191–199

    CAS  Google Scholar 

  143. http://www.lab901.com. Cited 13 July 2007

  144. McCormick RM, Nelson RJ, Alonso-Amigo MG, Benvegnu DJ, Hooper HH (1997) Anal Chem 69:2626–2630

    CAS  Google Scholar 

  145. Giboz J, Copponnez T, Mele P (2007) J Micromech Microeng 17:R96–R109

    CAS  Google Scholar 

  146. Yu L, Koh CG, Lee JL, Koelling KW, Madou MJ (2002) Polymer Eng Sci 42(5):871–888

    CAS  Google Scholar 

  147. Hulme JP, Mohr S, Goddard NJ, Fielden PR (2002) Lab Chip 2:203–206

    CAS  Google Scholar 

  148. Svedberg M, Pettersson A, Nilsson S, Bergquist J, Nyholm L, Nikolajeff F, Markides K (2003) Anal Chem 75:3934–3940

    CAS  Google Scholar 

  149. Han AR, Wang O, Graff M, Mohanty SK, Edwards TL, Han KH, Frazier AB (2003) Lab Chip 3:150–157

    CAS  Google Scholar 

  150. Noerholm M, Bruus H, Jakobsen M, Telleman P, Ramsing N (2004) Lab Chip 4:28–37

    CAS  Google Scholar 

  151. Ahn CH, Choi JW, Beaucage G, Nevin JH, Lee JB, Puntambekar A, Lee JY (2004) Proc IEEE 92:154–173

    CAS  Google Scholar 

  152. Xu G, Yu L, Lee JL, Koelling KW (2005) Polymer Eng Sci 45:866–875

    CAS  Google Scholar 

  153. Kim DS, Lee SH, Ahn CH, Lee JY, Kwon TH (2006) Lab Chip 6:794–802

    CAS  Google Scholar 

  154. Mair DA, Geiger E, Pisano AP, Frechet JM, Svec F (2006) Lab Chip 6:1346–1354

    CAS  Google Scholar 

  155. Gärtner C, Klemm R, Becker H (2007) Proc SPIE 6465:6465502-11–6465502-8

    Google Scholar 

  156. Nikcevic I et al (2007) J Chromat A 1154(1–2):444–453

    CAS  Google Scholar 

  157. Madou M, Zoval J, Jia G, Kido H, Kim J Kim N (2006) Ann Rev Biomed Eng 8:601–628

    CAS  Google Scholar 

  158. Felton M (2003) Anal Chem 75:302A–306A

    CAS  Google Scholar 

  159. Lee LJ, Madou MJ, Koelling KW, Daunert S, Lai S, Koh GC, Juang YJ, Lu Y, Yu L (2001) Biomedical Microdevices 3:339–351

    Google Scholar 

  160. Johnson RD, Badr IHA, Barrett G, Lai S, Lu Y, Madou MJ, Bachas LG (2001) Anal Chem 73:3940–3946

    CAS  Google Scholar 

  161. Madou MJ, Lu Y, Lai S, Koh CG, Juang YJ, Lee LJ, Wenner B (2001) Sens Actuators A 91:301–306

    Google Scholar 

  162. Madou MJ, Lee LJ, Daunert S, Lai S, Shih CH (2001) Biomed Microdevices 3:245–254

    CAS  Google Scholar 

  163. Lai S, Wang S, Luo L, Lee JL, Yang ST, Madou MJ (2003) Anal Chem 76:1832–1837

    Google Scholar 

  164. Gustafsson M, Hirschberg D, Palmberg C, Jornvall H, Bergman T (2004) Anal Chem 76:345–350

    CAS  Google Scholar 

  165. Kim J, Jang SH, Jia G, Zoval JV, Da Silva NA, Madou MJ (2004) Lab Chip 4:516–522

    CAS  Google Scholar 

  166. Rothert A, Deo SK, Millner L, Puckett LG, Madou MJ, Daunert S (2005) Anal Biochem 342:11–19

    CAS  Google Scholar 

  167. Inganas M, Derand H, Eckersten A, Ekstrand G, Honerud A-K, Jesson G, Thorsen G, Soderman T, Andersson P (2005) Clin Chem 51:1985–1987

    Google Scholar 

  168. Haeberle S, Brenner T, Schlosser H-P, Zengerle R, Ducree J (2005) Chem Eng Technol 28:613–616

    CAS  Google Scholar 

  169. Haeberle S, Brenner T, Schlosser P, Zengerle R, Ducrée J (2005) Chem Eng Technol 28:613–616

    CAS  Google Scholar 

  170. Grumann M, Geipel A, Riegger L, Zengerle R, Ducree J (2005) Lab Chip 5:560–565

    CAS  Google Scholar 

  171. Brenner T, Glatzel T, Zengerle R, Ducree J (2005) Lab Chip 5:146–150

    CAS  Google Scholar 

  172. Moschou E, Nicholson A, Jia G, Zoval J, Madou MJ, Bachas L, Daunert S (2006) Anal Bioanal Chem 385:596–605

    CAS  Google Scholar 

  173. Steigert J, Grumann M, Dube M, Streule W, Riegger L, Brenner T, Koltay P, Mittmann K, Zengerle R, Ducree J (2006) Sens Actuators A 130–131:228–233

    Article  CAS  Google Scholar 

  174. Haeberle S, Brenner T, Zengerle R, Ducrée J (2006) Lab Chip 6:776–781

    CAS  Google Scholar 

  175. Ducree J, Haeberle S, Brenner T, Glatzel T, Zengerle R (2006) Microfluid Nanofluid 2:97–105

    Google Scholar 

  176. Ducrée J, Haeberle S, Lutz S, Pausch S, von Stetten F, Zengerle R (2007) J Micromech Microeng 17:103–115

    Google Scholar 

  177. Cho YK, Lee JG, Park JM, Lee BS, Lee Y, Ko C (2007) Lab Chip 7:565–573

    CAS  Google Scholar 

  178. McDonald JC, Duffy DC, Anderson JR, Chiu DT, Wu HK, Schueller OJA, Whitesides GM (2000) Electrophoresis 21:27–40

    CAS  Google Scholar 

  179. Whitesides GM, Ostuni E, Takayama S, Jiang X, Ingber DE (2001) Ann Rev Biomed Eng 3:335–573

    CAS  Google Scholar 

  180. Sia SK, Whitesides GM (2003) Electrophoresis 24(21):3563–3576

    CAS  Google Scholar 

  181. Gates BD, Xu Q, Stewart M, Ryan D, Willson CG, Whitesides GM (2005) Chem Rev 105:1171–1196

    CAS  Google Scholar 

  182. Kumar A, Whitesides GM (1993) Appl Phys Lett 63:2002–2004

    CAS  Google Scholar 

  183. Whitesides GM (1998) Angew Chemie 37:550–575

    Google Scholar 

  184. Kim E, Xia Y, Whitesides GM (1996) J Am Chem Soc 118:5722–5731

    CAS  Google Scholar 

  185. Kim E, Xia Y, Zhao XM, Whitesides GM (1997) Adv Mater 9:651–654

    CAS  Google Scholar 

  186. Ng JMK, Gitlin GI, Stroock AD, Whitesides GM (2002) Electrophoresis 23:3461–3473

    CAS  Google Scholar 

  187. Stroock AD, Dertinger SKW, Adjari A, Mezic I, Stone HA, Whitesides GM (2002) Science 295:647–651

    CAS  Google Scholar 

  188. Unger MA, Chou HP, Thorsen T, Scherer A, Quake SR (2000) Science 288:113–116

    CAS  Google Scholar 

  189. Grover WH, Skelley AM, Liu CN, Lagally ET, Mathies RA (2003) Sens Actuators B 89:315–323

    Google Scholar 

  190. Takao H, Miyamura K, Ebi H, Ashiki M, Sawada K, Ishida M (2005) Sens Actuators A 119:468–475

    Google Scholar 

  191. Kim J, Na K, Kang CJ, Kim Y (2005) Sens Actuators A 120:365–369

    Google Scholar 

  192. Song WH, Lichtenburg J (2005) J Micromech Microeng 15:1425–32

    Google Scholar 

  193. Jeong OK, Park SW, Yang SS, Pak JJ (2005) Sens Actuators A 123–124:453–458

    Google Scholar 

  194. Eddings MA, Gale BK (2006) J Micromech Microeng 16:2396–2402

    Google Scholar 

  195. Blake AJ, Pearce TM, Rao RS, Johnson SM, Williams JC (2007) Lab Chip 7:842–849

    CAS  Google Scholar 

  196. Quake SR, Scherer A (2000) Science 290:1536–1540

    CAS  Google Scholar 

  197. Thorsen T, Maerkl SJ, Quake SR (2002) Science 298:580–584

    CAS  Google Scholar 

  198. Liu J, Hansen C, Quake SR (2003) Anal Chem 75(18):4718–4723

    CAS  Google Scholar 

  199. Hong JW, Studer V, Hang G, Anderson WF, Quake SR (2004) Nature Biotechnol 22(4):435–439

    CAS  Google Scholar 

  200. Lee CC et al (2005) Science 310:1793–1796

    CAS  Google Scholar 

  201. Marcus JS, Anderson WF, Quake SR (2006) Anal Chem 78(3):956–958

    CAS  Google Scholar 

  202. Marcus JS, Anderson WF, Quake SR (2006) Anal Chem 78(9):3084–3089

    CAS  Google Scholar 

  203. Feng H, Gaur A, Yugang S, Word M, Niu J, Adesida I, Shim M, Shim A, Rogers JA (2006) IEEE Trans Nanotechnol 5:301–308

    Google Scholar 

  204. Li N, Tourovskaia A, Folch A (2003) Crit Rev Biomed Eng 31(5&6):423–488

    Google Scholar 

  205. Toner M, Irimia D (2005) Ann Rev Biomed Eng 7:77–103

    CAS  Google Scholar 

  206. El-Ali J, Sorger PK, Jensen KF (2006) Nature 442:403–411

    CAS  Google Scholar 

  207. Weibel DB, Whitesides GM (2006) Current Opin Chem Biol 10:584–591

    CAS  Google Scholar 

  208. Kartalov EP, French AW, Scherer A (2006) J Nanoscience Nanotechnol 6:2265–2277

    CAS  Google Scholar 

  209. Baudoin R, Corlu A, Griscom L, Legallais C, Leclerc E (2007) Toxicol In Vitro 21:535–544

    CAS  Google Scholar 

  210. Taylor AM, Blurton-Jones M, Rhee SW, Cribbs DH, Cotman CW, Jeon NL (2005) Nat Methods 2(8):599–605

    CAS  Google Scholar 

  211. Rhee SW, Taylor AM, Tu CH, Cribbs DH, Cotman CW, Jeon NL (2005) Lab Chip 5(1):102–107

    CAS  Google Scholar 

  212. Revzin A, Sekine K, Sin A, Tompkins RG, Toner M (2005) Lab Chip 5:30–37

    CAS  Google Scholar 

  213. Sethu P et al (2006) Anal Chem 78:5453–5461

    CAS  Google Scholar 

  214. Saadi W, Wang SJ, Lin F, Jeon NL (2006) Biomed Microdevices 8(2):109–118

    Google Scholar 

  215. Park JW, Vahidi B, Taylor AM, Rhee SW, Jeon NL (2006) Nature Protoc 1(4):2128–2136

    CAS  Google Scholar 

  216. Kane BJ, Zinner MJ, Yarmush ML, Toner M (2006) Anal Chem 78(13):4291–4298

    CAS  Google Scholar 

  217. Irimia D, Liu SY, Tharp WG, Samadani A, Toner M, Poznansky MC (2006) Lab Chip 6(2):191–198

    CAS  Google Scholar 

  218. Zhang Z, Boccazzi P, Choi HC, Perozziello G, Sinskey AJ, Jensen KF (2006) Lab Chip 7:906–913

    Google Scholar 

  219. Schaff UY, Xing MM, Lin KK, Pan N, Jeon NL, Simon SI (2007) Lab Chip 7(4):448–456

    CAS  Google Scholar 

  220. Balagadde FK, You L, Hansen CL, Arnold FH, Quake SR (2005) Science 309(5731):137–140

    CAS  Google Scholar 

  221. Ottesen EA, Hong JW, Quake SR, Leadbetter JR (2006) Science 314:1464–1467

    CAS  Google Scholar 

  222. Hansen CL, Skordalakes E, Berger JM, Quake SR (2002) Proc Natl Acad Sci 99:16531–16536

    CAS  Google Scholar 

  223. Hansen CL, Sommer MO, Quake SR (2004) Proc Natl Acad Sci 101(40):14431–14436

    CAS  Google Scholar 

  224. Walters EM, Clark SG, Beebe DJ, Wheeler MB (2004) Methods Mol Biol 254:375–382

    Google Scholar 

  225. Lucchetta EM, Lee JH, Fu LA, Patel NH, Ismagilov RF (2005) Nature 434:1134–1138

    CAS  Google Scholar 

  226. Chen Z, Gao Y, Su R, Li C, Lin J (2003) Electrophoresis 24:3246–3252

    CAS  Google Scholar 

  227. Qu S, Chen X, Chen D, Yang P, Chen G (2006) Electrophoresis 27:4910–4918

    CAS  Google Scholar 

  228. Chen Y, Yang P, Li J, Chen D, Chen G (2006) Anal Bioanal Chem 384:683–691

    CAS  Google Scholar 

  229. Fiorini GS, Jeffries GDM, Lim DSW, Kuyper CL, Chiu DT (2003) Lab Chip 3:158–163

    CAS  Google Scholar 

  230. Fiorini GS, Lorenz RM, Kuo JS, Chiu DT (2004) Anal Chem 76:4697–4704

    CAS  Google Scholar 

  231. Fiorini GS, Yim M, Jeffries GDM, Schiro PG, Mutch SA, Lorenz RM, Chiu DT (2007) Lab Chip 7:923–926

    CAS  Google Scholar 

  232. Rainelli A, Stratz R, Schweizer K, Hauser PC (2003) Talanta 61:659–665

    CAS  Google Scholar 

  233. Yussuf A, Sbarski I, Hayes J, Solomon M, Tran N (2003) J Micromech Microeng 15:1692–1699

    Google Scholar 

  234. Rossier JS, Reymond F, Michel PE (2002) Electrophoresis 23:858–867

    CAS  Google Scholar 

  235. Rossier JS, Girault HH (2001) Lab Chip 1:153–157

    CAS  Google Scholar 

  236. Gobry V, Van Oostrum J, Martinelli M, Rohner T, Reymond F, Rossier JS, Girault HH (2002) Proteomics 2:405–412

    CAS  Google Scholar 

  237. Rossier JS, Vollet C, Carnal A, Lagger G, Gobry V, Michel P, Reymond F, Girault HH (2002) Lab Chip 2:145–150

    CAS  Google Scholar 

  238. Garra J, Long T, Currie J, Scneider T, White R, Paranjape M (2002) J Vac Sci Technol A 20(3):975

    CAS  Google Scholar 

  239. Vlachopoulou ME, Tserepi A, Vourdas N, Gogolides E, Misiakos K (2005) J Phys Conf Ser 10:293–296

    CAS  Google Scholar 

  240. Ross D, Johnson TJ, Locascio LE (2001) Anal Chem 73:2509–2515

    CAS  Google Scholar 

  241. Grass B, Neyer A, Jöhnck M, Siepe D, Eisenbeiß F, Weber G, Hergenröder R (2001) Sens Actuators B 72:249–258

    Google Scholar 

  242. Grass B, Siepe D, Neyer A, Hergenröder R (2001) Fresenius J Anal Chem 371:228–233

    CAS  Google Scholar 

  243. Wang J, Pumera M, Chatrathi MP, Escarpa A, Konrad R, Griebel A, Dörner W, Löwe H (2002) Electrophoresis 23:596

    CAS  Google Scholar 

  244. Liu CC, Cui DF (2005) Microsystem Technol 11:1262–1266

    CAS  Google Scholar 

  245. Pethig R, Burt JPH, Parton A, Rizvi N, Talary MS, Tame JA (1998) J Micromech Microeng 8:57–63

    CAS  Google Scholar 

  246. Rajaraman S, Noh H, Hesketh PJ, Gottfried DS (2006) Sens Actuators B 114:392–401

    Google Scholar 

  247. Gärtner C, Kirsch S, Anton B, Becker H (2007) Proc SPIE 6465:64650F–1–64650F–4

    Google Scholar 

  248. Johirul M, Shiddiky A, Kim RE, Shim YB (2005) Electrophoresis 26:3043–3052

    CAS  Google Scholar 

  249. Shiddiky MJ, Park DS, Shim YB (2005) Electrophoresis 26(24):4656–4663

    CAS  Google Scholar 

  250. Kuhnline CD, Gangel MG, Hulvey MK, Martin RS (2006) Analyst 131:202–207

    CAS  Google Scholar 

  251. Moore C, Minteer SD, Martin RS (2005) Lab Chip 5:218–225

    CAS  Google Scholar 

  252. Makamba H, Kim JH, Lim K, Park N, Hahn JH (2003) Electrophoresis 24:3607–3619

    CAS  Google Scholar 

  253. Thuillier G, Khan-Malek C (2005) Microsystem Technol 12:180–185

    CAS  Google Scholar 

  254. Ebara M, Hoffman JM, Hoffman AS, Stayton PS (2006) Lab Chip 6:843–848

    CAS  Google Scholar 

  255. Haubert K, Drier T, Beebe D (2006) Lab Chip 6:1548–1549

    CAS  Google Scholar 

  256. Bubendorfer A, Liu X, Ellis AV (2007) Smart Mater Struct 16:367–371

    CAS  Google Scholar 

  257. Niklaus F, Enoksson P, Kälvesten E, Stemme G (2001) J Micromech Microeng 11:100–107

    CAS  Google Scholar 

  258. Dang F, Shinohara S, Tabata O, Yamaoka Y, Kurokawa M, Shinohara Y, Ishikawa M, Baba Y (2005) Lab Chip 5:472

    CAS  Google Scholar 

  259. Wu HK, Huang B, Zare RN (2005) Lab Chip 5:1393–1398

    CAS  Google Scholar 

  260. Kentsch J, Breisch S, Stelzle M (2006) J Micromech Microeng 16:802–807

    CAS  Google Scholar 

  261. Chow WWY, Lei KF, Shi G, Li WL, Huang Q (2006) Smart Mater Struct 15:112–116

    Google Scholar 

  262. Li S, Friedhoff C, Young R, Ghodssi R (2003) J Micromech Microeng 13:732–738

    CAS  Google Scholar 

  263. Song Y, Kumar C, Hormes J (2004) J Micromech Microeng 14:932–940

    CAS  Google Scholar 

  264. Pan CT, Yang H, Shen SC, Chou MC, Chou HP (2002) J Micromech Microeng 12:611–615

    CAS  Google Scholar 

  265. Su YC, Lin L (2005) IEEE Trans Adv Packaging 28:635–642

    CAS  Google Scholar 

  266. Noh HS, Huang Y, Hesketh P (2004) Sens Actuators B 102:78–85

    Google Scholar 

  267. Kelly RT, Woolley AT (2003) Anal Chem 75:1941–1945

    CAS  Google Scholar 

  268. Klintberg L, Svedberg M, Nikolaejeff F, Thornell G (2003) Sens Actuators A 103:307–316

    Google Scholar 

  269. Blanco F et al (2004) J Micromech Microeng 14:1047–1056

    Google Scholar 

  270. Chen Z, Gao Y, Lin J, Su R, Xie Y (2004) J Chromatogr A 1038:239

    CAS  Google Scholar 

  271. Yao L, Liu B, Chen T, Liu S, Zuo T (2005) Biomed Microdevices 7:253–257

    CAS  Google Scholar 

  272. Li J, Chen D, Chen G (2005) Anal Lett 38:1127–1136

    CAS  Google Scholar 

  273. Tsao CW, Hromada L, Liu J, Kumar P, DeVoe DL (2007) Lab Chip 7:499

    CAS  Google Scholar 

  274. Bhattacharyya A, Klapperich CM (2007) Lab Chip 7:876–882

    CAS  Google Scholar 

  275. Hiratsuka A, Muguruma H, Lee KH, Karube I (2004) Biosens Bioelectron 19:1667–1672

    CAS  Google Scholar 

  276. Lin CH, Chao CH, Lan CW (2005) Sens Actuators B 21:698–705

    Google Scholar 

  277. Kelly R, Pan T, Woolley AT (2005) Anal Chem 77:3536–3541

    CAS  Google Scholar 

  278. Shah JJ, Geist J, Locascio LE, Gaitin M, Rao MV, Vreeland WN (2006) Anal Chem 78:3348–3353

    CAS  Google Scholar 

  279. Brown L, Koerner T, Horton JH, Oleschuk RD (2006) Lab Chip 6:66–73

    CAS  Google Scholar 

  280. Truckenmüller R, Cheng Y, Ahrens R, Bahrs H, Fischer G, Lehmann J (2006) Microsyst Technol 12:1027–1029

    Google Scholar 

  281. Truckenmüller R, Ahrens R, Cheng Y, Fischer G, Saile V (2006) Sens Actuators A 132:385–392

    Google Scholar 

  282. Hoult AP (2003) Proc SPIE 5063:308–313

    Google Scholar 

  283. Griebel A, Rund S, Schönfeld F, Dörner W, Konrad R, Hardt S (2004) Lab Chip 4:18–23

    CAS  Google Scholar 

  284. Pfleging W, Baldus O, Bruns M, Baldini A, Bemporad E (2005) Proc SPIE 5713:479–488

    CAS  Google Scholar 

  285. Chen JW, Zybko JM (2005) Proc SPIE-Int Soc Opt Eng 5718:92–98

    Google Scholar 

  286. Klotzbücher T, Letschert M, Braune T, Drese K, Doll T (2006) Proc SPIE 6107:34–47

    Google Scholar 

  287. Ussing T, Petersen LV, Nielsen CB, Helbo B, Højslet L (2006) Int J Adv Manuf Technol 33:198–205

    Google Scholar 

  288. Kim J, Xu X (2003) J Laser Appl 15:255–260

    CAS  Google Scholar 

  289. Soper SA, Henry AC, Vaidya B, Galloway M, Wabuyele M, McCarley RL (2002) Anal Chim Acta 470:87–99

    CAS  Google Scholar 

  290. Locascio LE, Henry AC, Johnson TJ, Ross D (2003) In: Oosterbroeck RE, van den Berg A (eds) Lab-on-a-Chip. Elsevier, London, pp 65–82

  291. Belder D, Ludwig M (2003) Electrophoresis 24:3595–3606

    CAS  Google Scholar 

  292. Hong SM, Kim SH, Kim JH, Hwang HI (2006) J Phys Conf Ser 34:656–661

    CAS  Google Scholar 

  293. Wang Y, Vaidya B, Farquar HD, Stryjewski W, Hammer RP, McCarley RL, Soper SA, Cheng YW, Barany F (2003) Anal Chem 75:1130–1140

    CAS  Google Scholar 

  294. Peytavi R et al (2005) Clin Chem 51:1836–1844

    CAS  Google Scholar 

  295. Diaz-Quijada GA, Peytavi R, Nantel A, Roy E, Bergeron ME, Dumoulin MM, Veres T (2007) Lab Chip 7:856

    CAS  Google Scholar 

  296. Dankbar D, Gauglitz G (2006) Anal Bioanal Chem 386:1967–1974

    CAS  Google Scholar 

  297. Bi H, Meng S, Li Y, Guo K, Chen Y, Kong J, Yang P, Zhong W, Liu B (2006) Lab Chip 6:769–775

    CAS  Google Scholar 

  298. Gaudioso J, Craighead HG (2002) J Chromatogr A 971:249–253

    CAS  Google Scholar 

  299. Patrito N, McCague C, Norton PR, Petersen NO (2007) Langmuir 23:715–719

    CAS  Google Scholar 

  300. Tan HML, Fukuda H, Akagi T, Ichiki T (2007) Thin Solid Films 515:5172–5178

    CAS  Google Scholar 

  301. Pal R et al (2005) Lab Chip 5:1024–1032

    CAS  Google Scholar 

  302. Yager P, Edwards T, Fu E, Helton K, Nelson K, Tam MR, Weigl BH (2006) Nature 442:412–418

    CAS  Google Scholar 

  303. http://www.smarthealthip.com. Cited 20 July 2007

  304. Hofmann O, Wang X, Cornwell A, Beecher S, Raja A, Bradley DC, deMello AJ, deMello JC (2006) Lab Chip 6:981–987

    CAS  Google Scholar 

  305. Lin CH, Lee GB, Chen SH, Chang GL (2003) Sens Actuators A 107:125–131

    Google Scholar 

  306. Krawczyk S (2003) Phys Status Solidi C 0:998–1012

    CAS  Google Scholar 

Download references

Acknowledgements

We would like to thank Bonnie Gray from Simon Fraser University, Turtle Brennen from Agilent Technologies, Enrico Piechotka from Jenoptik Laser Optik Systeme GmbH, Prof. Roland Zengerle from IMTEK, University of Freiburg, Stefan Drese from IMM, Mainz, Prof. Heinz Kück from HSG-IMAT and Max Sonnleitner from Nanoident Technologies AG for the kind provision of the figures. We thank Susanne Haldrich for her support in the literature research.

Author information

Authors and Affiliations

  1. microfluidic ChipShop GmbH, Carl-Zeiss-Promenade 10, 07745, Jena, Germany

    Holger Becker & Claudia Gärtner

Authors
  1. Holger Becker
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Claudia Gärtner
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Holger Becker.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Becker, H., Gärtner, C. Polymer microfabrication technologies for microfluidic systems. Anal Bioanal Chem 390, 89–111 (2008). https://doi.org/10.1007/s00216-007-1692-2

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00216-007-1692-2

Keywords

Search

Navigation