Abstract
Near-field evanescent wave coupling of various subwavelength grating pairs, using a 1.55 μm infrared semiconductor laser has been demonstrated for use as an optical MEMS sensor. Subwavelength grating pairs were fabricated on both glass and silicon substrates. When coupled together the effective grating period is not subwavelength and can exhibit several diffraction orders. The 1.55 μm infrared source was incident on the coupled pairs and the first-order output intensity was recorded and compared with the output intensity from simulated results. This demonstrated evanescent wave coupling concept can be applied to MEMS systems with nanometer gap separations (e.g., pressure sensors, biosensors, and accelerometers) to allow for subnanometer displacement detection.
Similar content being viewed by others
References
C. Girard, A. Dereux, Rep. Prog. Phys. 59, 657 (1996)
B.E.N. Keeler, D.W. Carr, J.P. Sullivan, T.A. Friedmann, J.R. Wendt, Opt. Lett. 29, 1182 (2004)
W.A. Challener, J.D. Edwards, R.W. McGowan, J. Skorjanec, Z. Yang, Sens. Actuators B, Chem. 71, 42 (2000)
T. Tamir, S. Peng, Appl. Phys. A, Mater. Sci. Process. 14, 235 (1977)
S.T. Peng, J. Opt. Soc. Am. A 7, 1448 (1990)
A.-A.A. Rogers, S. Samson, S. Kedia, J. Opt. Soc. Am. A 26, 2526 (2009)
M.C. Gupta, S.T. Peng, Opt. Lett. 16, 1301 (1991)
M. Aktary, M.D. Jensen, K.L. Westra, M.J. Brett, M.R. Freeman, J. Vac. Sci. Technol., B Microelectron. Process. Phenom. 21, L5 (2003)
B.D. Myers, V.P. Dravid, Nano Lett. 6, 963 (2006)
P. Puetz, K. Jacobs, in Proceedings of the Tenth International Symposium on Space Terahertz Technology (University of Virginia, Berlin, 1999)
M.L. Schuette, W. Lu, Simple Technique for Beam Focusing in Electron Beam Lithography on Optically Transparent Substrates. AVS (2009)
S.T. Peng, T. Tamir, H.L. Bertoni, IEEE Trans. Microw. Theory Tech. 23, 123 (1975)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Rogers, AA.A., Kedia, S., Samson, S. et al. Verification of evanescent coupling from subwavelength grating pairs. Appl. Phys. B 105, 833–837 (2011). https://doi.org/10.1007/s00340-011-4712-z
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00340-011-4712-z