Abstract
This paper presents an ultra-thin and flexible polymer-based capacitive pressure sensor for intraocular pressure (IOP) monitoring in a mouse eye. Due to the size limitation of the anterior chamber in the mouse eye, a volume of approximately 700 × 700 × 150 μm3 on a small substrate is available for the MEMS capacitive pressure sensor. Moreover, the sensor would ideally be easily injectable into place. Further complicating the sensing is the need to operate the device on the curved surface of the anterior chamber with minimum damage to the eye tissue. Therefore, a thin and flexible substrate is required. We fabricate sensors by exploiting Parylene as a biocompatible structural material in a suitable form factor and 25 μm thick liquid crystal polymer (LCP) as a soft and flexible host substrate. Using our approach, the flexibility and small form factor necessary for a mouse eye implant is achieved, along with the sensitivity required to monitor IOP fluctuations. This device will allow better study of glaucoma through close monitoring in mice after integration with other components.
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Y. Barkana, S. Anis, J. Liebmann, C. Tello, R. Ritch, Arch. Opththalmol. 124, 793–797 (2006)
M.W. Charles, N. Brown, Phys. Med. Biol. 20(2), 202–218 (1975)
P.-J. Chen, D.C. Rodger, S. Saati, M.S. Humayun, Y.-C. Tai, J. Microelectromech, Syst. 17, 1342–1351 (2008)
P.-J. Chen, S. Saati, R. Varma, M.S. Humayun, Y.-C. Tai, J. Microelectromech, Syst. 19, 721–734 (2010)
E.Y. Chow, A.L. Chlebowski, P.P. Irazoqui, IEEE Trans. Biomed. Circuit Syst. 4(6), 340–349 (2010a)
E.Y. Chow, D. Ha, T. Lin, W.N. De Vries, S.W.M. John, W.J. Chappell, P.P. Irazoqui, Proceedings of the IEEE Engineering in Medicine and Biology Conference. (Buenos Aires, Argentina, August 31–September 4, 2010), pp. 6429–6432
R. Dean, J. Weller, M. Bozack, B. Farrell, L. Jauniskis, J. Ting, D. Edell, J. Hetke, J. Microelectron, Electron. Packag. 4(1), 17–22 (2007)
R. Dean, J. Weller, M. Bozack, B. Farrell, L. Jauniskis, J. Ting, D. Edell, J. Hetke, Proc. SPIE Int. Symp. Opt. Sci. Technol. (Denver, Colorado USA, August 2–6, 2004), pp. 88–99
R. Dean, J. Weller, M. Bozack, C. Rodekohr, B. Farrell, L. Jauniskis, J. Ting, D. Edell, J. Hetke, IEEE Trans. Comp. Packag. Tech. 31(2), 315–321 (2008)
G. Fragiacomo, T. Ansbaek, T. Pedersen, O. Hansen, E.V. Thomsen, Sens. Actuators A 161, 114–119 (2010)
J. Han, M.A. Shannon, IEEE Sensors J. 9, 199–206 (2009)
T.A. Harder, T. Yao, Q. He, C. Shih, Y.C. Tai, Micro Electro Mechanical Systems (Las Vegas, Nevada USA, January 20–24, 2002), pp. 435–438
Helmholtz Zentrum München Research Institute, Mouse eye image, http://www.helmholtz-muenchen.de/en/ieg/gmc/research/technologies/eye.html. Accessed 1 March 2011
G.R. Howell, R.T. Libby, J.K. Marchant, L.A. Wilson, I.M. Cosma1, R.S. Smith1, M.G. Anderson, S.W.M. John, BMC Genetics (2007) doi:10.1186/1471-2156-8-45
A. Hughes, Vision Res. 12, 123–138 (1972)
G. Jiang, Frontier in Neuroscience 4, 1–4 (2010)
S.W.M. John, M.G. Anderson, R.S. Smith, J. Glaucoma 8, 400–412 (1999)
S.W.M. John, J.R. Hagaman, T.E. MacTaggart, L. Peng, O. Smithesf, Invest Ophthalmol. Vis. Sci. 38, 249–253 (1997)
S.W.M. John, R.S. Smith, O.V. Savinova, N.L. Hawes, B. Chang, D. Turnbull, M. Davisson, T.H. Roderick, J.R. Heckenlively, Invest. Opthamol. Vis. Sci. 39, 951–962 (1998)
K.C. Katuri, S. Ansrani, M.K. Ramasubramanian, IEEE Sensors J. 8, 12–19 (2008)
H. Kim, K. Najafi, J. Microelectromech, Syst. 16, 1386–1396 (2007)
J. Lee, K. Hwang, K. Yoon, T. Kim, S. Ahn, IEEE Trans. Plasma Science 32(2), 505–509 (2004)
R.T. Libby, Y. Li, O.V. Savinova, J. Barter, R.S. Smith, R.W. Nickells, S.W.M. John, PLoS Genet. 1, 17–26 (2005)
T. Lin, D. Ha, W.N. DeVries, B. Kim, A.L. Chlebowski, S.W.M. John, P.P. Irazoqui, W.J. Chappell, IEEE MTT-S Int. Microwave Symp. (Baltimore, Maryland USA, June 7–9, 2011), pp 1–4
P.G. Mcmenamin, R.J. Steptoe, J. Anat. 178, 65–77 (1991)
E. Meng, Y.-C. Tai, Micro Electro Mechanical Systems (Miami, Florida USA, January 30-February 3, 2005), pp 568–571
MicroFab Bremen, Capacitive pressure sensor E1.3N datasheet, http://www.microfab.de/downloads/20080109datasheete1.3na4.pdf, Accessed 1 September 2008
H.-S. Noh, Y. Huang, P.J. Hesketh, Sens. Actuators B 102, 78–85 (2004)
J.N. Palasagaram, R. Ramadoss, IEEE Sensors J. 6, 1374–1375 (2006)
Prevent Blindness America, National Eye Institute, Vision problems in the U.S. http://www.preventblindness.net/site/DocServer/CDD_Vision_Report.pdf, Accessed 1 September 2008
R. Schellin et al., Measurement of the mechanical behavior of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters. Sens. Actuators A 41, 287–292 (1994)
S. Timoshenko, S. Woinowsky-Krieger, Theory of Plate and Shells, 2nd edn. (McGraw-Hill, New York, 1959), pp. 54–55
X. Wang, L. Lu, C. Liu, J. Micromech, Microeng. 13, 628–633 (2003)
J. Yoon, C. Han, E. Yoon, C. Kim, SPIE Conference on Material and Device characterization in Micromachining (Santa Clara, California USA, 1998), pp. 316–325
D.J. Young, J. Du, C.A. Zorman, W.H. Ko, IEEE Sensors J. 4, 464–470 (2004)
D. Ziegler, T. Suzuki, S. Takeuchi, J. Microelectromech, Syst. 15, 1477–1482 (2006)
Acknowledgement
This work is funded by a Collaborative Innovation Award from the Howard Hughes Medical Institute (HHMI). The authors also wish to acknowledge the technical assistance of Special Coating System (SCS). SWMJ is an Investigator of the HHMI.
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Ha, D., de Vries, W.N., John, S.W.M. et al. Polymer-based miniature flexible capacitive pressure sensor for intraocular pressure (IOP) monitoring inside a mouse eye. Biomed Microdevices 14, 207–215 (2012). https://doi.org/10.1007/s10544-011-9598-3
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DOI: https://doi.org/10.1007/s10544-011-9598-3