Abstract
In this work, nanopillar-forest based surface-enhanced Raman scattering substrates were fabricated using a novel approach. The key technique of the approach is taking advantage of convexes on Poly-Si surfaces as support structures in sidewall technology. The tip-diameters of the fabricated nanopillars are from 5 to 10 nm, heights are of several microns, and density of the nanopillar-based forests is around 20/μm2. In these nanopillar forests, there are plenty of nanoscale gaps. When covered with a thin layer of noble metal, the nanopillar forests exhibit a high SERS-active capability. Primary measurement results demonstrate that the nanopillar-forest based SERS substrates have an enhancement factor of an order of 4.62 × 106. It is expected that such SERS substrates may have applications in biological monitoring and chemical detection.
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Bao, A., Mao, H., Xiong, J. et al. Nanopillar-forest based surface-enhanced Raman scattering substrates. Sci. China Inf. Sci. 57, 1–7 (2014). https://doi.org/10.1007/s11432-014-5114-8
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DOI: https://doi.org/10.1007/s11432-014-5114-8