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Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

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Acknowledgements

This work was supported by National Natural Science Foundation of China (Grant Nos. 61603303, 61803309, 61573365, 61833016), Natural Science Basic Research Program of Shaanxi (Grant No. 2017JQ6005), Fundamental Research Funds for the Central Universities (Grant No. G2017KY0008), and Innovation Development Foundation of Loving Students (Grant No. ASNIF2015-1502).

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Authors and Affiliations

  1. School of Electronics and Information, Northwestern Polytechnical University, Xi’an, 710072, China

    Zhao Xu

  2. Xi’an Research Institute of High-Technology, Xi’an, 710025, China

    Changhua Hu

  3. School of Automation, Northwestern Polytechnical University, Xi’an, 710072, China

    Jinwen Hu

Authors
  1. Zhao Xu
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  2. Changhua Hu
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  3. Jinwen Hu
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Correspondence to Changhua Hu.

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Xu, Z., Hu, C. & Hu, J. Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes. Sci. China Inf. Sci. 62, 89201 (2019). https://doi.org/10.1007/s11432-018-9593-1

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