Abstract
We demonstrate few-charge occupation of electron and hole quantum dots in silicon via charge sensing. We have fabricated quantum dot (QD) devices in a silicon metal-oxide-semiconductor heterostructure comprising a single-electron transistor next to a single-hole transistor. Both QDs can be tuned to simultaneously sense charge transitions of the other one. We further detect the few-electron and few-hole regimes in the QDs of our device by active charge sensing.
- Received 13 January 2020
- Revised 1 May 2020
- Accepted 5 May 2020
DOI:https://doi.org/10.1103/PhysRevB.101.201301
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