Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test

Peng Su; Manal Khreishi; Tianquan Su; Run Huang; Margaret Z. Dominguez; Alejandro V. Maldonado; Guillaume P. Butel; Yuhao Wang; Robert E. Parks; James H. Burge

doi:10.1117/1.OE.53.3.031305

2 December 2013 Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test

Peng Su, Manal Khreishi, Tianquan Su, Run Huang, Margaret Z. Dominguez, Alejandro V. Maldonado, Guillaume P. Butel, Yuhao Wang, Robert E. Parks, James H. Burge

Author Affiliations +

Optical Engineering, Vol. 53, Issue 3, 031305 (December 2013). https://doi.org/10.1117/1.OE.53.3.031305

Abstract

A software configurable optical test system (SCOTS) based on deflectometry was developed at the University of Arizona for rapidly, robustly, and accurately measuring precision aspheric and freeform surfaces. SCOTS uses a camera with an external stop to realize a Hartmann test in reverse. With the external camera stop as the reference, a coordinate measuring machine can be used to calibrate the SCOTS test geometry to a high accuracy. Systematic errors from the camera are carefully investigated and controlled. Camera pupil imaging aberration is removed with the external aperture stop. Imaging aberration and other inherent errors are suppressed with an N-rotation test. The performance of the SCOTS test is demonstrated with the measurement results from a 5-m-diameter Large Synoptic Survey Telescope tertiary mirror and an 8.4-m diameter Giant Magellan Telescope primary mirror. The results show that SCOTS can be used as a large-dynamic-range, high-precision, and non-null test method for precision aspheric and freeform surfaces. The SCOTS test can achieve measurement accuracy comparable to traditional interferometric tests.

Citation Download Citation

Peng Su, Manal Khreishi, Tianquan Su, Run Huang, Margaret Z. Dominguez, Alejandro V. Maldonado, Guillaume P. Butel, Yuhao Wang, Robert E. Parks, and James H. Burge "Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test," Optical Engineering 53(3), 031305 (2 December 2013). https://doi.org/10.1117/1.OE.53.3.031305

Published: 2 December 2013

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