spectral changeとは 意味・読み方・使い方

The method for monitoring polishing irradiates a surface of a substrate having a laminated structure with light during polishing of a substrate, receives reflected light returned from the substrate, decomposes the reflected light according to a wavelength to generate a spectral waveform, applies a numerical filter for selectively removing a predetermined optical interference component to the spectral waveform to generate a spectral waveform for monitoring, and monitors a change in the spectral waveform for monitoring during polishing.例文帳に追加

本研磨監視方法は、基板の研磨中に、積層構造を有する基板の表面に光を照射し、基板から戻る反射光を受光し、反射光を波長に従って分解して分光波形を生成し、所定の光学干渉成分を選択的に除去するための数値フィルタを分光波形に適用して監視用分光波形を生成し、監視用分光波形の変化を研磨中に監視する。 - 特許庁

To obtain proper spectral analysis by taking into consideration the characteristics of a liquid crystal element that makes the phase difference between ordinary/extraordinary lights change.例文帳に追加

常光・異常光間の位相差を変化させる液晶素子の特性を考慮することにより、適正な分光分析を実現する。 - 特許庁

To automatically properly change spectral transmission characteristics of a filter according to the characteristics of a subject, without enlarging a filter device or reducing operability.例文帳に追加

装置の大型化や操作性の低下を招くことなく、フィルタの分光透過特性を被写体の特性に適したものに自動的に切り替え可能とする。 - 特許庁

To provide an inspection apparatus for accurately detecting defects on the surface of an object to be inspected even if the spectral characteristics of illumination light change.例文帳に追加

照明光の分光特性が変化しても、被検物体の表面の欠陥を正確に検出できる検査装置を提供する。 - 特許庁

Regulating the temperature of the light source 30 can suppress the effect of the luminous quantity and a spectral change accompanied by temperature fluctuations in the light source 30 for enhancing reading accuracy.例文帳に追加

光源３０の温度変動に伴う光量やスペクトルの変化の影響を抑制し、読取精度が向上する。 - 特許庁

A predetermined change in the resonance form or the free spectral range indicates a reaction of the indicator to the agent.例文帳に追加

共振形または自由スペクトル領域の所定の変化は、作用物質に対する表示物質の反応を示す。 - 特許庁

An appropriate optical membrane is provided on a sample substrate so as to detect a micro change in admittance with high sensitivity as a change in spectral characteristics due to the adhesion of a very small amount of contaminants onto the sample substrate, and contaminants or contaminant gases are detected as changes in spectral characteristics.例文帳に追加

サンプル基板上への極微量汚染物の付着による微小なアドミッタンス変化が分光特性変化として高感度に検出できるようにサンプル基板上に適当な光学薄膜を設け、汚染物または汚染ガスを分光特性の変化として検出した。 - 特許庁

The rate of change in this ratio relative to the change in wavelength after wavelength modulation is detected in a lock-in amplifier 26 and, out of this rate of change, differential spectral signals of the absorbance spectrum of glucose in the object part are extracted.例文帳に追加

この比率の波長変調の波長の変化に対する変化率をロックイン増幅器２６で検出し、この変化率から検査部位におけるグルコースの吸収スペクトルの微分スペクトル信号を取り出す。 - 特許庁