Extreme ultraviolet lithography: Revision history

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curprev 03:1503:15, 25 November 2024 Citation bot talk contribs 122,775 bytes 0 Altered bibcode. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Wikipedia:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 21/308 undo

curprev 05:2005:20, 22 November 2024 Guiding light talk contribs 122,799 bytes +3 No edit summary undo Tags: Mobile edit Mobile web edit Advanced mobile edit

curprev 15:4415:44, 6 November 2024 ChrisC47 talk contribs m 122,298 bytes −1 fixed terrible sentence structure undo

curprev 04:1504:15, 16 October 2024 Citation bot talk contribs 122,299 bytes +5 Alter: title, template type. Add: chapter, chapter-url. Removed or converted URL. Removed parameters. Some additions/deletions were parameter name changes. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Wikipedia:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 123/425 undo

curprev 20:0920:09, 6 October 2024 JdelaF talk contribs 122,294 bytes −5 added 13.5 nm undo Tags: Mobile edit Mobile app edit iOS app edit App select source
curprev 20:0320:03, 6 October 2024 JdelaF talk contribs 122,299 bytes +36 added “laser-pulsed tin plasma” to intro undo Tags: Mobile edit Mobile app edit iOS app edit App select source

curprev 19:2419:24, 1 October 2024 Boynamedsue talk contribs 122,256 bytes −26 remove whom tag, agent present "congress" undo

curprev 01:5201:52, 3 September 2024 Citation bot talk contribs 122,286 bytes +122 Altered chapter. Add: isbn, page, editors 1-2. | Use this bot. Report bugs. | Suggested by Grimes2 | #UCB_webform 913/924 undo

curprev 23:0523:05, 20 August 2024 Citation bot talk contribs 122,164 bytes +369 Altered template type. Add: volume, doi, date, title, bibcode, journal, authors 1-6. Removed URL that duplicated identifier. Changed bare reference to CS1/2. Removed parameters. | Use this bot. Report bugs. | Suggested by Qwerfjkl | Linked from User:Qwerfjkl/sandbox/Bare_URLs | #UCB_webform_linked 1610/3849 undo
curprev 12:2212:22, 20 August 2024 Qwerfjkl talk contribs m 121,795 bytes +115 Added 2 {{Bare URL inline}} and 1 {{Bare URL PDF}} tag(s) using a script. For other recently-tagged pages with bare URLs, see Category:Articles with bare URLs for citations from August 2024 and Category:Articles with PDF format bare URLs for citations undo

curprev 03:0603:06, 12 August 2024 OAbot talk contribs m 121,680 bytes +17 Open access bot: doi updated in citation with #oabot. undo

curprev 08:3908:39, 7 August 2024 Goodphy talk contribs 120,570 bytes +24 →Summary of key features: Clarify what the meaning of EUV generation efficiency (replaced with "CO2 laser to EUV conversion efficiency). undo Tag: Visual edit

curprev 07:4207:42, 6 August 2024 Lfstevens talk contribs 120,546 bytes −261 Filled in 4 bare reference(s) with reFill 2 undo
curprev 02:2102:21, 6 August 2024 Goodphy talk contribs 120,807 bytes +635 →Summary of key features: Added citations of why CO2 laser + Sn droplet is chosen as EUV Source for EUVL. undo Tag: Visual edit

curprev 08:0608:06, 5 August 2024 EvanBaldonado talk contribs m 120,172 bytes +2 Replace hyphen with en-dash. undo

curprev 02:2002:20, 22 July 2024 Guiding light talk contribs 118,698 bytes −219 more concise, density is true impact undo