The first evidence for the synthesis of a uniform, adhesive polyethylene–FeOx (PE–FeOx) surface l... more The first evidence for the synthesis of a uniform, adhesive polyethylene–FeOx (PE–FeOx) surface leading efficiently to bacterial inactivation is addressed in this study.
... From energy-resolved mass spectrometry, the nature and energy distributions of positive and n... more ... From energy-resolved mass spectrometry, the nature and energy distributions of positive and negative ions impinging on the surface of a growing TiO 2 film were investigated as a function of the total pressure P T . The thin films were deposited by DC reactive magnetron ...
Nb1 - xTixNy thin films (with 0 <= x <= 1 and 0.85 <= y <= 1.15) were deposited from ... more Nb1 - xTixNy thin films (with 0 <= x <= 1 and 0.85 <= y <= 1.15) were deposited from Nb and Ti metallic targets using a hybrid process combining high-power impulse magnetron sputtering (HiPIMS) and DC magnetron sputtering (DCMS) techniques. Two series of Nb1-xTixNy films were deposited in which the HiPIMS mode was applied either to the Nb or to the Ti target while the second target (Ti or Nb) was operated in DCMS mode. The HiPIMS generator was operated at a fixed time-average power of 100 W (5 W cm(-2)) with a pulse-width of 50 mu s and a repetition frequency of 1000 Hz whereas the DC power applied to the second target was varied from 0 to 90 W to adjust the relative contents of Ti or Nb in the films. Depositions were performed in an Ar + N-2 atmosphere at a total pressure of 0.5 Pa. The substrate temperature was fixed at 250 degrees C and the sample holder was biased at -50 V. The films were characterized by XRD, SEM, EDS, nanoindentation, optical and electrical measurements. All the ternary films crystallize in the fcc NaCl-type of the structure. The films exhibit a dense columnar structure and their hardness values increase from 26 for TiN to 35 GPa for NbN. The optical properties of the Nb1 - xTixNy films progressively evolve from those of the fcc-NbN to those of the fcc-TiN as the Ti content x increases from 0 to 1. The room temperature resistivity value decreases from about 300 mu Omega cm (for NbN0.99) down to 25 mu Omega cm (for TiN0.98) as x increases from 0 to 1. In contrast to that, Nb1 - xTixNy films deposited under similar deposition conditions using DCMS exhibit open columnar structure, low hardness values (15 to 22 GPa), high electrical resistivity in the range of 200-360 mu Omega cm, and optical properties without clear correlation with the chemical composition of the films. The peculiar physical properties of these films, compared with those obtained by the hybrid process, are mainly attributed to their open columnar morphology. (C) 2015 Elsevier B.V. All rights reserved.
2018 20th International Conference on Transparent Optical Networks (ICTON), 2018
Single photon technology is enabling for quantum communication and processing. Combining single p... more Single photon technology is enabling for quantum communication and processing. Combining single photon sources, routing circuitry and highly efficient detectors in a high yield, low-loss and scalable fashion represent today a major challenge. Nanophotonic devices allow for the realization of on-chip small footprint architectures for generating, manipulating and detecting single photons. Waveguide-integrated superconducting nanowire single photon detectors are today state-of-the art devices capable of detecting single photons propagating in an integrated photonic circuit with high efficiency, speed and low timing uncertainty. Their excellent metrics in the near-infrared allows to directly interface on-chip devices with existing C-Band communication technology systems. To move towards high communication speed, efficient detectors able to sustain Gcps count rate are desirable. Here we present the design process and the experimental characterization of a new generation of fast detectors, consisting of µm-long NbN superconducting nanowires embedded in a SOI two-dimensional photonic crystal cavity. Almost 70% efficiency at telecommunication wavelengths has been achieved with negligible dark counts and sub-ns recovery time, which could enable Gcps count rates.
This study reports the photosensitizing effect/mechanism of FeOx under visible light irradiation ... more This study reports the photosensitizing effect/mechanism of FeOx under visible light irradiation and charge transfer to TiO2 on FeOx–TiO2 cosputtered film.
AlN/TiN multilayered thin films with layer thickness ranging from 1 nm to 50 nm were synthesized ... more AlN/TiN multilayered thin films with layer thickness ranging from 1 nm to 50 nm were synthesized using rf magnetron sputtering at 400°C. Two series of samples were prepared at the substrate bias of Vb = −25 V and −100 V to modify growth texture of individual layers and verify its influence on the formation of coherent structures. XRD and TEM observations showed that in large period films (tc ≥ 30 nm) each constituent grows under its own kinetic, leading to the formation of nano-crysatlline film randomly oriented with no pronounced texture. Decreasing progressively the layer thickness favours the alignment of (0002) basal plane of w-AlN on (111) plane of TiN, and results in development of strong (111) texture, prerequisite for stabilisation of c-AlN and the formation of epitaxial coherent structures. The degree of crystallographic coherence was found to be higher in TiN(111) oriented films than for TiN(002) textured films. The increase of hardness coincides with the structure transit...
WC/amorphous carbon (a-C) thin films were deposited by dual magnetron sputtering from individual ... more WC/amorphous carbon (a-C) thin films were deposited by dual magnetron sputtering from individual WC and graphite targets. The influence of film composition and microstructure on the optical and electrical properties was investigated. As evidenced by x-ray photoelectron spectroscopy and grazing angle x-ray diffraction measurements, the WC/a-C films are composite materials made of hexagonal W2C and/or cubic β-WC1−X nanocrystallites embedded in
Boron nitride films deposited by ion beam assisted deposition (IBAD) and triode sputtering system... more Boron nitride films deposited by ion beam assisted deposition (IBAD) and triode sputtering system are studied. The presence of the cubic phase was checked by transmission infrared spectroscopy. The adhesion of the films was very poor, the films delaminated just after deposition. In an attempt to improve the adhesion, the deposition conditions (ion energy and flux) were changed after the
The first evidence for the synthesis of a uniform, adhesive polyethylene–FeOx (PE–FeOx) surface l... more The first evidence for the synthesis of a uniform, adhesive polyethylene–FeOx (PE–FeOx) surface leading efficiently to bacterial inactivation is addressed in this study.
... From energy-resolved mass spectrometry, the nature and energy distributions of positive and n... more ... From energy-resolved mass spectrometry, the nature and energy distributions of positive and negative ions impinging on the surface of a growing TiO 2 film were investigated as a function of the total pressure P T . The thin films were deposited by DC reactive magnetron ...
Nb1 - xTixNy thin films (with 0 <= x <= 1 and 0.85 <= y <= 1.15) were deposited from ... more Nb1 - xTixNy thin films (with 0 <= x <= 1 and 0.85 <= y <= 1.15) were deposited from Nb and Ti metallic targets using a hybrid process combining high-power impulse magnetron sputtering (HiPIMS) and DC magnetron sputtering (DCMS) techniques. Two series of Nb1-xTixNy films were deposited in which the HiPIMS mode was applied either to the Nb or to the Ti target while the second target (Ti or Nb) was operated in DCMS mode. The HiPIMS generator was operated at a fixed time-average power of 100 W (5 W cm(-2)) with a pulse-width of 50 mu s and a repetition frequency of 1000 Hz whereas the DC power applied to the second target was varied from 0 to 90 W to adjust the relative contents of Ti or Nb in the films. Depositions were performed in an Ar + N-2 atmosphere at a total pressure of 0.5 Pa. The substrate temperature was fixed at 250 degrees C and the sample holder was biased at -50 V. The films were characterized by XRD, SEM, EDS, nanoindentation, optical and electrical measurements. All the ternary films crystallize in the fcc NaCl-type of the structure. The films exhibit a dense columnar structure and their hardness values increase from 26 for TiN to 35 GPa for NbN. The optical properties of the Nb1 - xTixNy films progressively evolve from those of the fcc-NbN to those of the fcc-TiN as the Ti content x increases from 0 to 1. The room temperature resistivity value decreases from about 300 mu Omega cm (for NbN0.99) down to 25 mu Omega cm (for TiN0.98) as x increases from 0 to 1. In contrast to that, Nb1 - xTixNy films deposited under similar deposition conditions using DCMS exhibit open columnar structure, low hardness values (15 to 22 GPa), high electrical resistivity in the range of 200-360 mu Omega cm, and optical properties without clear correlation with the chemical composition of the films. The peculiar physical properties of these films, compared with those obtained by the hybrid process, are mainly attributed to their open columnar morphology. (C) 2015 Elsevier B.V. All rights reserved.
2018 20th International Conference on Transparent Optical Networks (ICTON), 2018
Single photon technology is enabling for quantum communication and processing. Combining single p... more Single photon technology is enabling for quantum communication and processing. Combining single photon sources, routing circuitry and highly efficient detectors in a high yield, low-loss and scalable fashion represent today a major challenge. Nanophotonic devices allow for the realization of on-chip small footprint architectures for generating, manipulating and detecting single photons. Waveguide-integrated superconducting nanowire single photon detectors are today state-of-the art devices capable of detecting single photons propagating in an integrated photonic circuit with high efficiency, speed and low timing uncertainty. Their excellent metrics in the near-infrared allows to directly interface on-chip devices with existing C-Band communication technology systems. To move towards high communication speed, efficient detectors able to sustain Gcps count rate are desirable. Here we present the design process and the experimental characterization of a new generation of fast detectors, consisting of µm-long NbN superconducting nanowires embedded in a SOI two-dimensional photonic crystal cavity. Almost 70% efficiency at telecommunication wavelengths has been achieved with negligible dark counts and sub-ns recovery time, which could enable Gcps count rates.
This study reports the photosensitizing effect/mechanism of FeOx under visible light irradiation ... more This study reports the photosensitizing effect/mechanism of FeOx under visible light irradiation and charge transfer to TiO2 on FeOx–TiO2 cosputtered film.
AlN/TiN multilayered thin films with layer thickness ranging from 1 nm to 50 nm were synthesized ... more AlN/TiN multilayered thin films with layer thickness ranging from 1 nm to 50 nm were synthesized using rf magnetron sputtering at 400°C. Two series of samples were prepared at the substrate bias of Vb = −25 V and −100 V to modify growth texture of individual layers and verify its influence on the formation of coherent structures. XRD and TEM observations showed that in large period films (tc ≥ 30 nm) each constituent grows under its own kinetic, leading to the formation of nano-crysatlline film randomly oriented with no pronounced texture. Decreasing progressively the layer thickness favours the alignment of (0002) basal plane of w-AlN on (111) plane of TiN, and results in development of strong (111) texture, prerequisite for stabilisation of c-AlN and the formation of epitaxial coherent structures. The degree of crystallographic coherence was found to be higher in TiN(111) oriented films than for TiN(002) textured films. The increase of hardness coincides with the structure transit...
WC/amorphous carbon (a-C) thin films were deposited by dual magnetron sputtering from individual ... more WC/amorphous carbon (a-C) thin films were deposited by dual magnetron sputtering from individual WC and graphite targets. The influence of film composition and microstructure on the optical and electrical properties was investigated. As evidenced by x-ray photoelectron spectroscopy and grazing angle x-ray diffraction measurements, the WC/a-C films are composite materials made of hexagonal W2C and/or cubic β-WC1−X nanocrystallites embedded in
Boron nitride films deposited by ion beam assisted deposition (IBAD) and triode sputtering system... more Boron nitride films deposited by ion beam assisted deposition (IBAD) and triode sputtering system are studied. The presence of the cubic phase was checked by transmission infrared spectroscopy. The adhesion of the films was very poor, the films delaminated just after deposition. In an attempt to improve the adhesion, the deposition conditions (ion energy and flux) were changed after the
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