The 0.7% frequency variability measured on 1024 NEMS arrays allows higher effective sensing area than the previously published active NEMS sensors [3]–[5].

Publications. 1024 3D-Stacked Monolithic NEMS Array with 375μm20.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing. IEEE ...