Grain Size Reduction of Ferroelectric HZO Enabled by a Novel Solid ...
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We invent a novel, effective, and versatile technique employing replacement electrode solid phase epitaxy (SPE), achieving a significant reduction in the grain ...
This technique achieves a significant reduction in the grain size of the HZO layer by approximately 30% and simultaneously enhances the remnant polarization ( ...
In this work, we address these issues by using a replacement electrode solid phase epitaxy (SPE) method where a thin HZO polycrystalline seed layer was first ...
Oct 10, 2023 · 在这项工作中，我们介绍了一种有效且通用的技术，采用替代电极固相外延（SPE）来实现Zr 掺杂HfO2（HZO）铁电层的晶粒尺寸减小。该技术使HZO 层的晶粒尺寸显着减 ...
Missing: Novel Approach:
Grain size reduction of ferroelectric HZO enabled by a novel solid phase epitaxy (SPE) approach: Working principle, experimental demonstration, and ...
In this work, we introduce an effective and versatile technique employing replacement electrode solid phase epitaxy (SPE) to realize grain size reduction.
Sep 21, 2023 · Zhang et al., “Grain Size Reduction of Ferroelectric HZO Enabled by a Novel Solid Phase Epitaxy (SPE) Approach: Working Principle, Experimental ...
Grain size reduction of ferroelectric HZO enabled by a novel solid phase epitaxy (SPE) approach: Working principle, experimental demonstration, and ...
Grain Size Reduction of Ferroelectric HZO Enabled by Solid Phase Epitaxy (SPE): Working Principle, Experimental Demonstration, and Theoretical Understanding.
Gong, “Grain size reduction of ferroelectric HZO enabled by a novel solid phase epitaxy (SPE) approach: Working principle, experimental demonstration, and ...