Both the numerical and experimental results demonstrate a linear yet reduced stiffness tuning ability of the triangular capacitor as a result of fringe effect.

We show that the capacitance increases continuously between Cmin = 0.52 pF and Cmax = 18.5 pF following addition of deionized (DI) water in microchannels. The .

This paper introduces a modified structure for parallel-plate-based MEMS tunable capacitors. The capacitor has triangular electrodes with geometric and ...

This paper presents a novel geometry and modified structural stiffness for electrostatically actuated MEMS tunable capacitors. The design is based on parallel- ...

Dec 23, 2020 · This paper reports a novel MEMS accelerometer whose effective stiffness can be adjusted flexibly and even tuned to almost zero by using the ...

Jul 13, 2009 · In this research, a novel structure for parallel-plate-based capacitors is introduced. The capacitor has electrodes with triangular shape and ...

Electrostatically actuated parallel-plate MEMS tunable capacitors are desired elements for different applications including sensing, actuating and ...

Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response ... These beams provide extra stiffness as tuning voltage ...

We present results on the development of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two- ...