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2017 9th International Conference on Electronics, Computers and Artificial Intelligence (ECAI), 2017
Many examples for the usage of electromagnetic forces in micromanipulation systems are available ... more Many examples for the usage of electromagnetic forces in micromanipulation systems are available in the literature. The behavior of electromagnet and the dependence of their electromagnetic force on different parameters are a classical subject. In this respect, this paper presents a method to model, simulate and measure the electromagnetic force of a small electromagnet, used as actuator for compliant elements of micromanipulation system. In order to model and simulate the electromagnetic force COMSOL and FEM applications are used. Also the magnetic flux density and the electromagnetic force were measured in different points. Afterwards, simulation and experimental results are compared.
Un dispositif de micropositionnement (100) d'un actionneur piezoelectrique (200) est divulgue... more Un dispositif de micropositionnement (100) d'un actionneur piezoelectrique (200) est divulgue. Le dispositif comprend : des moyens de commande d'un champ electrique applique audit actionneur piezoelectrique (200) de sorte a deformer le materiau piezoelectrique (201) et, des moyens de mesure simultanee d'une variation de charge electrique accumulee sur l'actionneur piezoelectrique (200) resultant de la deformation; et des moyens d'acquisition des mesures de la variation de charge electrique, de traitement de ces acquisitions et d'estimation d'un deplacement (x, y, z) de l'actionneur piezoelectrique (200) et/ou d'une force appliquee, comprenant : un generateur de tension connecte en parallele a : un pont diviseur compose d'une premiere resistance et d'une seconde resistance en serie, et a une premiere capacite connectee en serie a l'actionneur piezo-electrique, un amplificateur de charges ayant une premiere entree connectee a un noeud en...
The positioning into micro fabrication systems is an important part for general operational succe... more The positioning into micro fabrication systems is an important part for general operational success. The robustness of the positioning subsystem generates the accuracy of displacements specific to this kind of technical applications. The authors focused on the obtaining for an experimental device that has permitted to develop an interferometric measure method for sub micrometric displacements using optical devices. The high accuracy requested by micro applications involves Nano measure level and the capacity to develop data flow for movement control at this scale in real time. The wavelength of utilised laser beam is 633 nm and became the measure unit for positioning system. Also the measuring part is completed by another part referred to actuation, more precisely to piezoelectric actuation. A dynamic measure method was developed in this paper, utilising piezoelectric actuators designed for oscillating working actions. Finally we present here the performance of interferometric devic...
2015 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), 2015
ABSTRACT This paper presents how a Lead Magnesium Niobate – Lead Titanate (PMN-PT) based actuator... more ABSTRACT This paper presents how a Lead Magnesium Niobate – Lead Titanate (PMN-PT) based actuator, poled and cut along the [001] crystalline direction, can be used as an integrated actuator in a Micro Opto Electro Mechanical System (MOEMS). This cut was chosen as it has been proved to present piezoelectric coefficients that surpass 4500pm/V. This makes PMN-PT suitable for bulk usage. The actuator may be used as part of a Reconfigurable Free Space – Micro Optical Bench (RFS-MOB) to control the displacement of a micro-mirror. Finite Element simulations were used to study the influence of the actuator shape over the generated displacement, as well as the soldering medium. It was observed that for actuators with surfaces between 500x500µm 2 and 800x800µm 2 and a thickness of 200µm, displacement of up to 370nm is achievable. While the actuator profile impacts directly on the free surface shape it is also in direct correlation with the size of the usable area of the micro-mirror.
Signal Measurement and Estimation Techniques for Micro and Nanotechnology, 2011
This chapter aims to develop a self-sensing technique to measure the displacement and the force i... more This chapter aims to develop a self-sensing technique to measure the displacement and the force in piezoelectric microactuators dedicated to micromanipulation and microassembly contexts. In order to answer the requirements in these contexts, the developed self-sensing should perform a long duration measurement of constant signals (displacement and force) as well as a high precision. Furthermore, we propose to consider the dynamics in the displacement self-sensing measurement such that a positioning feedback is possible and therefore a high micro/nanopositioning accuracy is obtained. The experimental results validate the proposed technique and demonstrate its conveniency for micromanipulation and microassembly contexts.
This paper explains and demonstrates a method to interconnect the video detection data flow with ... more This paper explains and demonstrates a method to interconnect the video detection data flow with an innovative coded grid in order to precisely associate absolute coordinates to any scanned (micro) objects over a large area, without the aid of external bulky sensors. The concept of measuring micro-objects absolute coordinates is based on a series of coded information markings (micrometric terminal blocks) regularly and precisely printed on the bottom reference surface. In this manner the image processing could extract the values of the coded markings and precisely provide absolute coordinates for the camera image. The correspondence between the object and its absolute coordinates seems therefore straightforward. A very important challenge which must be solved is to read the information in real time, the method solving an optimization problem between the required processing speed and the maximum computing system resources. Finally it was obtained an innovative mechatronic system made...
2017 9th International Conference on Electronics, Computers and Artificial Intelligence (ECAI), 2017
Many examples for the usage of electromagnetic forces in micromanipulation systems are available ... more Many examples for the usage of electromagnetic forces in micromanipulation systems are available in the literature. The behavior of electromagnet and the dependence of their electromagnetic force on different parameters are a classical subject. In this respect, this paper presents a method to model, simulate and measure the electromagnetic force of a small electromagnet, used as actuator for compliant elements of micromanipulation system. In order to model and simulate the electromagnetic force COMSOL and FEM applications are used. Also the magnetic flux density and the electromagnetic force were measured in different points. Afterwards, simulation and experimental results are compared.
Un dispositif de micropositionnement (100) d'un actionneur piezoelectrique (200) est divulgue... more Un dispositif de micropositionnement (100) d'un actionneur piezoelectrique (200) est divulgue. Le dispositif comprend : des moyens de commande d'un champ electrique applique audit actionneur piezoelectrique (200) de sorte a deformer le materiau piezoelectrique (201) et, des moyens de mesure simultanee d'une variation de charge electrique accumulee sur l'actionneur piezoelectrique (200) resultant de la deformation; et des moyens d'acquisition des mesures de la variation de charge electrique, de traitement de ces acquisitions et d'estimation d'un deplacement (x, y, z) de l'actionneur piezoelectrique (200) et/ou d'une force appliquee, comprenant : un generateur de tension connecte en parallele a : un pont diviseur compose d'une premiere resistance et d'une seconde resistance en serie, et a une premiere capacite connectee en serie a l'actionneur piezo-electrique, un amplificateur de charges ayant une premiere entree connectee a un noeud en...
The positioning into micro fabrication systems is an important part for general operational succe... more The positioning into micro fabrication systems is an important part for general operational success. The robustness of the positioning subsystem generates the accuracy of displacements specific to this kind of technical applications. The authors focused on the obtaining for an experimental device that has permitted to develop an interferometric measure method for sub micrometric displacements using optical devices. The high accuracy requested by micro applications involves Nano measure level and the capacity to develop data flow for movement control at this scale in real time. The wavelength of utilised laser beam is 633 nm and became the measure unit for positioning system. Also the measuring part is completed by another part referred to actuation, more precisely to piezoelectric actuation. A dynamic measure method was developed in this paper, utilising piezoelectric actuators designed for oscillating working actions. Finally we present here the performance of interferometric devic...
2015 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), 2015
ABSTRACT This paper presents how a Lead Magnesium Niobate – Lead Titanate (PMN-PT) based actuator... more ABSTRACT This paper presents how a Lead Magnesium Niobate – Lead Titanate (PMN-PT) based actuator, poled and cut along the [001] crystalline direction, can be used as an integrated actuator in a Micro Opto Electro Mechanical System (MOEMS). This cut was chosen as it has been proved to present piezoelectric coefficients that surpass 4500pm/V. This makes PMN-PT suitable for bulk usage. The actuator may be used as part of a Reconfigurable Free Space – Micro Optical Bench (RFS-MOB) to control the displacement of a micro-mirror. Finite Element simulations were used to study the influence of the actuator shape over the generated displacement, as well as the soldering medium. It was observed that for actuators with surfaces between 500x500µm 2 and 800x800µm 2 and a thickness of 200µm, displacement of up to 370nm is achievable. While the actuator profile impacts directly on the free surface shape it is also in direct correlation with the size of the usable area of the micro-mirror.
Signal Measurement and Estimation Techniques for Micro and Nanotechnology, 2011
This chapter aims to develop a self-sensing technique to measure the displacement and the force i... more This chapter aims to develop a self-sensing technique to measure the displacement and the force in piezoelectric microactuators dedicated to micromanipulation and microassembly contexts. In order to answer the requirements in these contexts, the developed self-sensing should perform a long duration measurement of constant signals (displacement and force) as well as a high precision. Furthermore, we propose to consider the dynamics in the displacement self-sensing measurement such that a positioning feedback is possible and therefore a high micro/nanopositioning accuracy is obtained. The experimental results validate the proposed technique and demonstrate its conveniency for micromanipulation and microassembly contexts.
This paper explains and demonstrates a method to interconnect the video detection data flow with ... more This paper explains and demonstrates a method to interconnect the video detection data flow with an innovative coded grid in order to precisely associate absolute coordinates to any scanned (micro) objects over a large area, without the aid of external bulky sensors. The concept of measuring micro-objects absolute coordinates is based on a series of coded information markings (micrometric terminal blocks) regularly and precisely printed on the bottom reference surface. In this manner the image processing could extract the values of the coded markings and precisely provide absolute coordinates for the camera image. The correspondence between the object and its absolute coordinates seems therefore straightforward. A very important challenge which must be solved is to read the information in real time, the method solving an optimization problem between the required processing speed and the maximum computing system resources. Finally it was obtained an innovative mechatronic system made...
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