Journal of Micromechanics and Microengineering, 2005
Page 1. Solution hardened platinum alloy flexure materials for improved performance and reliabili... more Page 1. Solution hardened platinum alloy flexure materials for improved performance and reliability of MEMS devices This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2005 J. Micromech. Microeng. 15 43 ...
... JD Brazzlea, WP Taylora, B. Ganesha, IJ Priceb, and I. I. Bemstein Coming IntelliSense Corp... more ... JD Brazzlea, WP Taylora, B. Ganesha, IJ Priceb, and I. I. Bemstein Coming IntelliSense Corporation, bComing Incorporated 36 Jonspin Rd., Wilmington, MA. ... is accomplished by doping the silicon, or the addition of a metal layer on top of the flexure. ...
Journal of Micromechanics and Microengineering, 2005
Page 1. Solution hardened platinum alloy flexure materials for improved performance and reliabili... more Page 1. Solution hardened platinum alloy flexure materials for improved performance and reliability of MEMS devices This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2005 J. Micromech. Microeng. 15 43 ...
... JD Brazzlea, WP Taylora, B. Ganesha, IJ Priceb, and I. I. Bemstein Coming IntelliSense Corp... more ... JD Brazzlea, WP Taylora, B. Ganesha, IJ Priceb, and I. I. Bemstein Coming IntelliSense Corporation, bComing Incorporated 36 Jonspin Rd., Wilmington, MA. ... is accomplished by doping the silicon, or the addition of a metal layer on top of the flexure. ...
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