Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2018
Polyamide thin films were rapidly grown using spatial molecular layer deposition (MLD) in a rotat... more Polyamide thin films were rapidly grown using spatial molecular layer deposition (MLD) in a rotating cylinder reactor. The polyamide MLD films were coated on flexible metalized polyethylene terephthalate substrates using sequential exposures of trimesoyl chloride (TMC) and m-phenylenediamine (mPD). The rotating cylinder reactor was housed in a custom oven enclosure that maintained a constant temperature of 115 °C. One MLD cycle (TMC/mPD) was performed per rotation of the cylinder. Polyamide growth rates of 4.5 Å/cycle or 90 Å/min were observed at a slow rotation speed of 20 revolutions per minute (RPM) at a substrate speed of 0.33 m/s. Growth rates of 2.27 Å/cycle or 477 Å/min were measured at higher rotation speeds of 210 RPM at substrate speeds of 3.5 m/s. The polyamide film thicknesses were uniform over the substrate widths as large as ∼16.5 cm. The polyamide MLD surface chemistry was also self-limiting. Constant polyamide growth rate per cycle was measured at larger TMC and mPD ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2018
Polyamide thin films were rapidly grown using spatial molecular layer deposition (MLD) in a rotat... more Polyamide thin films were rapidly grown using spatial molecular layer deposition (MLD) in a rotating cylinder reactor. The polyamide MLD films were coated on flexible metalized polyethylene terephthalate substrates using sequential exposures of trimesoyl chloride (TMC) and m-phenylenediamine (mPD). The rotating cylinder reactor was housed in a custom oven enclosure that maintained a constant temperature of 115 °C. One MLD cycle (TMC/mPD) was performed per rotation of the cylinder. Polyamide growth rates of 4.5 Å/cycle or 90 Å/min were observed at a slow rotation speed of 20 revolutions per minute (RPM) at a substrate speed of 0.33 m/s. Growth rates of 2.27 Å/cycle or 477 Å/min were measured at higher rotation speeds of 210 RPM at substrate speeds of 3.5 m/s. The polyamide film thicknesses were uniform over the substrate widths as large as ∼16.5 cm. The polyamide MLD surface chemistry was also self-limiting. Constant polyamide growth rate per cycle was measured at larger TMC and mPD ...
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